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Electrolytic capacitor for electric field modulation

  • US 7,981,259 B2
  • Filed: 06/14/2006
  • Issued: 07/19/2011
  • Est. Priority Date: 06/14/2006
  • Status: Expired due to Fees
First Claim
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1. An apparatus for electrochemically processing a substrate with an electrolyte, comprising:

  • a capacitive element having a surface in contact with the electrolyte, wherein the capacitive element is independently biased from the substrate, the capacitive element disposed in the electrolyte forms a capacitor having a first chargeable area inside the surface of the capacitive element and a second chargeable area outside the capacitor element in the electrolyte, and the capacitive element is connected to a charging power supply configured to charge and discharge the capacitive element in a controlled manner without inducing electrochemical reactions.

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