Mechanically-actuated microfluidic valve
First Claim
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1. A mechanically-actuated microfluidic valve comprising:
- an inlet port;
an outlet port;
a weir positioned between said inlet and outlet ports;
a pair of opposed thermal bend actuators, each of said actuators comprising;
an active beam comprised of a thermoelastic material; and
a passive beam mechanically cooperating with said active beam, such that when a current is passed through the active beam, the active beam heats and expands relative to the passive beam, resulting in bending of the actuator; and
a valve closure member cooperating with said actuators, such that actuation of said actuators causes movement of said closure member relative to a sealing face of said weir, thereby regulating a flow of fluid from said inlet port to said outlet port, wherein said closure member is comprised of an elastomer fused or bonded to the active beams of said actuators and bridges a space therebetween.
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Abstract
A mechanically-actuated microfluidic valve. The valve comprises an inlet port; an outlet port; a thermal bend actuator; and a valve closure member cooperating with the actuator. Actuation of the thermal bend actuator causes movement of the closure member, thereby regulating a flow of fluid from the inlet port to the outlet port.
34 Citations
12 Claims
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1. A mechanically-actuated microfluidic valve comprising:
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an inlet port; an outlet port; a weir positioned between said inlet and outlet ports; a pair of opposed thermal bend actuators, each of said actuators comprising; an active beam comprised of a thermoelastic material; and a passive beam mechanically cooperating with said active beam, such that when a current is passed through the active beam, the active beam heats and expands relative to the passive beam, resulting in bending of the actuator; and a valve closure member cooperating with said actuators, such that actuation of said actuators causes movement of said closure member relative to a sealing face of said weir, thereby regulating a flow of fluid from said inlet port to said outlet port, wherein said closure member is comprised of an elastomer fused or bonded to the active beams of said actuators and bridges a space therebetween. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification