×

Three dimensional profile inspecting apparatus

  • US 7,986,402 B2
  • Filed: 05/10/2009
  • Issued: 07/26/2011
  • Est. Priority Date: 11/21/2008
  • Status: Expired
First Claim
Patent Images

1. A three-dimensional profile inspecting apparatus comprising:

  • at least a pair of optical-inspecting apparatuses; and

    a tilt angle adjustment mechanism having said at least a pair of optical-inspecting apparatuses, said tilt angle adjustment mechanism configured to adjust tilt angles of said at least a pair of optical-inspecting apparatuses, wherein said at least a pair of optical-inspecting apparatuses maintain focus on a single position and a subject to be inspected is within fields-of-view of said at least a pair of optical-inspecting apparatuses when said at least a pair of optical-inspecting apparatuses change the tilt angle, said tilt angle adjustment mechanism being a circular rail.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×