Three dimensional profile inspecting apparatus

• US 7,986,402 B2
• Filed: 05/10/2009
• Issued: 07/26/2011
• Est. Priority Date: 11/21/2008
• Status: Expired

• Current Assignee: Industrial Technology Research Institute
• Original Assignee: Industrial Technology Research Institute
• Inventors: Kuo, Shih Hsuan, Wang, Wei Cheng, Chen, Jin Liang
• Primary Examiner(s): NGUYEN, SANG H
• Application Number:
  US12/463,407
• Publication Number:
  US 20100128285A1
• Time in Patent Office: 807 Days
• Field of Search: 356/237.1, 356/237.2, 356/237.3, 356600-610, 250/201.3, 250/492.2, 250/442.11, 382128-133, 348 86- 88
• US Class Current: 356/237.1
• CPC Class Codes: G01B 11/245 using a plurality of fixed, simultaneously operating transducers G01B11/2408 - G01B11/2425, G01B11/255 take precedence
• CPC Class Codes: G01B 11/272 using photoelectric detection means

Abstract

A three-dimensional profile inspecting apparatus includes at least two optical inspecting apparatuses and a tilt angle adjusting mechanism. The tilt angle adjusting mechanism is equipped with the at least two optical inspecting apparatuses so as to adjust the tilt angles of the at least two optical inspecting apparatuses. When the tilt angles of the optical inspecting apparatuses are changed, the focuses of the optical inspecting apparatuses remain at a single position and a subject to be inspected is within the fields of view of the optical inspecting apparatuses. The three-dimensional profile of the subject can be obtained by building the images collected by the two optical inspecting apparatuses.

Claims

1. A three-dimensional profile inspecting apparatus comprising:

at least a pair of optical-inspecting apparatuses; and

a tilt angle adjustment mechanism having said at least a pair of optical-inspecting apparatuses, said tilt angle adjustment mechanism configured to adjust tilt angles of said at least a pair of optical-inspecting apparatuses, wherein said at least a pair of optical-inspecting apparatuses maintain focus on a single position and a subject to be inspected is within fields-of-view of said at least a pair of optical-inspecting apparatuses when said at least a pair of optical-inspecting apparatuses change the tilt angle, said tilt angle adjustment mechanism being a circular rail.

2. The three-dimensional profile inspecting apparatus of claim 1, said at least a pair of optical-inspecting apparatuses being equipped with pivotal rollers cooperative with said circular rail so as to allow said at least a pair of optical-inspecting apparatuses to move therealong so as to adjust the tilt angles thereof.

3. The three-dimensional profile inspecting apparatus of claim 1, said circular rail being integrally formed.

4. The three-dimensional profile inspecting apparatus of claim 1, wherein said tilt angle adjustment mechanism has at least one of a connection-rod mechanism, an X-Y planar moving stage and a rotation stage.

5. The three-dimensional profile inspecting apparatus of claim 1, further comprising:

a direction angle adjustment mechanism suitable for adjusting a direction angle of the subject.

6. The three-dimensional profile inspecting apparatus of claim 5, said direction angle adjustment mechanism comprising a moving stage and a rotation stage.

7. The three-dimensional profile inspecting apparatus of claim 1, each of the pair of optical-inspecting apparatuses having a motor and a lead screw and a connecting bar.

8. The three-dimensional profile inspecting apparatus of claim 1, the optical-inspecting apparatus being an optical microscope.

9. The three-dimensional profile inspecting apparatus of claim 1, the optical-inspecting apparatus being a non-optical microscope.

10. The three-dimensional profile inspecting apparatus of claim 1, the optical-inspecting apparatus being a interferometer.

11. The three-dimensional profile inspecting apparatus of claim 1, said at least a pair of optical-inspecting apparatuses maintaining focus on a single focus plane.