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Automatic generation of PID parameters for a scanning probe microscope

  • US 7,987,006 B2
  • Filed: 08/29/2007
  • Issued: 07/26/2011
  • Est. Priority Date: 08/29/2007
  • Status: Active Grant
First Claim
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1. A method for controlling a scanning probe microscope, the method comprising:

  • generating a scanning probe microscope model according to associated dynamics of the scanning probe microscope;

    selecting filter parameters that shape selected dynamics of the scanning probe microscope model;

    generating a notch filter using the filter parameters;

    encoding the notch filter as PID parameters; and

    implementing the PID parameters in a PID controller to control the scanning probe microscope.

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