Coupled pivoted acceleration sensors
First Claim
1. An apparatus, comprising:
- a substrate having substantially parallel first and second surfaces, comprising;
a reference frame;
a first unbalanced seismic mass suspended within the reference frame and coupled with the reference frame at two separate locations through first and second strain gauges, respectively, wherein the first and second strain gauges are aligned to enable the first unbalanced seismic mass to rotate around a first common axis of the first and second strain gauges, the first and second strain gauges comprising first and second piezoresistors on the first surface of the substrate;
a second unbalanced seismic mass flexibly coupled with the first unbalanced seismic mass, the second unbalanced seismic mass suspended within the reference frame and coupled with the reference frame at two separate locations through third and fourth strain gauges, respectively, wherein the third and fourth strain gauges are aligned to enable the second unbalanced seismic mass to rotate around a second common axis of the third and fourth strain gauges, the third and fourth strain gauges comprising third and fourth piezoresistors on the first surface of the substrate; and
metallization on the first surface of the substrate configured to connect the first, second, third and fourth piezoresistors in a bridge configuration without crossovers, wherein the first and the second unbalanced seismic masses are configured to rotate cooperatively to detect acceleration in a single direction.
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Accused Products
Abstract
A pivoted acceleration sensor has a substrate that is substantially parallel to first and second surfaces. A reference frame is provided. A first unbalanced seismic mass is suspended within the reference frame and is coupled with the reference frame through first and second strain gauges. The first and second strain gauges are located along a pivot axis of the first unbalanced seismic mass. The first and second strain gauges are first and second piezoresistors on the first surface of the substrate, A second unbalanced seismic mass is flexibly coupled with the first unbalanced seismic mass. The second unbalanced seismic mass is suspended within the reference frame and is coupled with the reference frame through third and fourth strain gauges. The third and fourth strain gauges are located along a pivot axis of the second unbalanced seismic mass. The third and fourth strain gauges are third and fourth piezoresistors on the first surface of the substrate. Metallization on the first surface of the substrate is configured to connect the first, second, third and fourth piezoresistors in a bridge configuration without crossovers.
22 Citations
24 Claims
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1. An apparatus, comprising:
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a substrate having substantially parallel first and second surfaces, comprising;
a reference frame;a first unbalanced seismic mass suspended within the reference frame and coupled with the reference frame at two separate locations through first and second strain gauges, respectively, wherein the first and second strain gauges are aligned to enable the first unbalanced seismic mass to rotate around a first common axis of the first and second strain gauges, the first and second strain gauges comprising first and second piezoresistors on the first surface of the substrate; a second unbalanced seismic mass flexibly coupled with the first unbalanced seismic mass, the second unbalanced seismic mass suspended within the reference frame and coupled with the reference frame at two separate locations through third and fourth strain gauges, respectively, wherein the third and fourth strain gauges are aligned to enable the second unbalanced seismic mass to rotate around a second common axis of the third and fourth strain gauges, the third and fourth strain gauges comprising third and fourth piezoresistors on the first surface of the substrate; and metallization on the first surface of the substrate configured to connect the first, second, third and fourth piezoresistors in a bridge configuration without crossovers, wherein the first and the second unbalanced seismic masses are configured to rotate cooperatively to detect acceleration in a single direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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Specification