Lift pin driving device and a flat panel display manufacturing apparatus having same

• US 7,988,817 B2
• Filed: 10/18/2007
• Issued: 08/02/2011
• Est. Priority Date: 11/10/2006
• Status: Expired due to Fees

• Current Assignee: INVENIA Co., Ltd.
• Original Assignee: INVENIA Co., Ltd.
• Inventors: Son, Hyoung Kyu
• Primary Examiner(s): Gramaglia; Maureen
• Assistant Examiner(s): NUCKOLS, TIFFANY Z
• Application Number:
  US11/874,272
• Publication Number:
  US 20080110397A1
• Time in Patent Office: 1,384 Days
• Field of Search: 118/715, 118/720, 118/721, 118/722, 118/724, 118/725, 118/728, 156/345.1, 156/345.51, 156/345.54, 269/254.CS, 269/266, 269/903
• US Class Current: 156/345.54
• CPC Class Codes: H01L 21/68742 characterised by a lifting arrangement, e.g. lift pins
• CPC Class Codes: H01L 21/68778 characterised by supporting substrates others than wafers, e.g. chips
• CPC Class Codes: Y10T 74/2101 Cams

Abstract

A lift pin driving device and a flat panel display (FPD) manufacturing apparatus having the device are provided. The lift pin driving device can precisely move a plurality of lift pins using one motor, thus realizing a simple lift pin driving structure and a simple motor control structure. This allows a space below a chamber body of the manufacturing apparatus to be configured in a variety of ways, thus reducing the cost of equipment and the production cost of products.

Claims

1. A lift pin driving device configured for use with a substrate support in a flat panel manufacturing device, comprising a driving structure, comprising:

a plurality of shafts coupled together at respective ends thereof so as to form a closed polygonal arrangement of shafts that define an open central portion; and

a single driver configured to rotate one of the plurality of shafts, wherein the respective ends of the plurality of shafts are coupled such that rotation of the one of the plurality of shafts causes the plurality of shafts to all rotate in the same direction simultaneously; and

a plurality of lift pins coupled to the driving structure, wherein the plurality of lift pins are configured to move vertically through a substrate support positioned above the driving structure as the single driver rotates the one of the plurality of shafts;

wherein each of the plurality of lift pins is coupled to one of the plurality of shafts by a cam.

2. The device of claim 1, wherein the plurality of lift pins are configured to move simultaneously upwards and simultaneously downwards through the substrate support as the driver rotates the one of the plurality of shafts.

3. The device of claim 1, wherein an upper end of each of the plurality of lift pins contacts a lower surface of a substrate positioned on the substrate support so as to lift or lower the substrate as the plurality of lift pins move vertically through the substrate support.

4. The device of claim 1, wherein the single driver comprises:

a single motor; and

a drive shaft coupled between the single motor and the one of the plurality of shafts, wherein the drive shaft is configured to transmit a rotational force from the single motor to the one of the plurality of shafts so as to rotate the one of the plurality of shafts.

5. The device of claim 4, wherein the drive shaft is coupled to the one of the plurality of shafts by a worm gear unit or a bevel gear unit.

6. The device of claim 5, wherein the drive shaft and motor are positioned at an outside of an outer periphery of the closed polygonal arrangement of shafts.

7. The device of claim 4, further comprising a power transmission unit configured to transmit the rotational force received by the one of the plurality of shafts to the remaining plurality of shafts such that the plurality of shafts rotate together to move the driving structure upwards and downwards.

8. The device of claim 7, wherein the power transmission unit comprises bevel gears provided at a coupling between the respective ends of the plurality of shafts such that rotation of the one of the plurality of shafts rotates the remaining plurality of shafts.

9. The device of claim 8, wherein a rotation of the plurality of shafts moves the plurality of lift pins fixed thereto simultaneously upwards or simultaneously downwards based on a direction of rotation of the drive shaft.

10. The device of claim 7, wherein a lower end of each of the plurality of lift pins is coupled to a respective shaft of the plurality of shafts, and wherein the plurality of lift pins move simultaneously upwards or simultaneously downwards based on a direction of rotation of the drive shaft.

11. The device of claim 10, wherein the single driver comprises a single motor that moves the plurality of lift pins simultaneously upwards or simultaneously downwards.

12. A flat panel display manufacturing apparatus comprising the lift pin driving device of claim 1.