Membrane grating for beam steering device and method of fabricating same
First Claim
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1. A method of fabricating a membrane structure for a diffractive phased array assembly, comprising the steps of:
- a) providing a wafer having a body and at least a membrane layer and a backside layer disposed on opposite faces of the body, and an etch-stop layer underlying the membrane layer;
b) forming a grating pattern in the surface of the membrane layer adjacent the wafer body;
c) forming a window through the wafer to expose a back surface of the membrane, thereby allowing light to pass through the membrane;
d) etching through the wafer and etching through the etch-stop layer to the membrane layer to form the window; and
e) mounting the membrane structure in a protective fixture prior to the step of etching through the etch stop layer, in order to protect the membrane layer.
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Abstract
A method of fabricating a membrane structure for a diffractive phased array assembly is provided. The method includes the steps of providing a wafer having a body and at least a membrane layer and a backside layer disposed on opposite faces of the body, forming a grating pattern on a surface of the membrane layer, and forming a window through the wafer to expose a back surface of the membrane, thereby allowing light to pass through the membrane.
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Citations
19 Claims
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1. A method of fabricating a membrane structure for a diffractive phased array assembly, comprising the steps of:
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a) providing a wafer having a body and at least a membrane layer and a backside layer disposed on opposite faces of the body, and an etch-stop layer underlying the membrane layer; b) forming a grating pattern in the surface of the membrane layer adjacent the wafer body; c) forming a window through the wafer to expose a back surface of the membrane, thereby allowing light to pass through the membrane; d) etching through the wafer and etching through the etch-stop layer to the membrane layer to form the window; and e) mounting the membrane structure in a protective fixture prior to the step of etching through the etch stop layer, in order to protect the membrane layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of fabricating a membrane structure for a diffractive phased array assembly, comprising the steps of:
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a) providing a wafer having a body and at least a membrane layer and a backside layer disposed on opposite faces of the body; b) forming a grating pattern in the surface of the membrane layer adjacent the wafer body; c) forming a window through the wafer to expose a back surface of the membrane, thereby allowing light to pass through the membrane; and d) confirming that the flatness of the membrane structure is within allowable limits. - View Dependent Claims (13, 14, 15)
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16. A method of fabricating a membrane structure for a diffractive phased array assembly, comprising the steps of:
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a) providing a wafer having a body and at least a membrane layer and a backside layer disposed on opposite faces of the body; b) forming a grating pattern in the surface of the membrane layer adjacent the wafer body; and c) forming a window through the wafer to expose a back surface of the membrane, thereby allowing light to pass through the membrane; and d) baking the membrane structure for a length of time at a temperature and humidity sufficient to promote native oxide growth on the membrane. - View Dependent Claims (17, 18, 19)
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Specification