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Method of sealing a cavity

  • US 7,989,262 B2
  • Filed: 11/07/2008
  • Issued: 08/02/2011
  • Est. Priority Date: 02/22/2008
  • Status: Active Grant
First Claim
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1. A method of forming a device having a substrate, one or more layers deposited thereover, the device having a cavity embedded between the substrate and the one or more layers and a first passage extending to the cavity, the method comprising:

  • removing material from one or more of the substrate and the one or more layers and redepositing the removed material in the first passage to seal the first passage.

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