System for heat treatment of semiconductor device
First Claim
1. A heat treatment system for a semiconductor device, the heat treatment system comprising:
- a loading unit for conveying the semiconductor device and a support plate, on which the semiconductor device is rested, after preheating the semiconductor device and the support plate at a predetermined preheating temperature, wherein the loading unit includes a susceptor, which has at an upper center portion thereof insulative slots and on which the support plate is placed, a heating device for heating the susceptor, a lifting device for moving the susceptor up and down, and a horizontal conveyance device for horizontally moving the support plate;
a heating unit including at least two furnaces, the temperatures of which are individually controlled and increased step by step up to a predetermined heat treatment temperature for the semiconductor device, wherein the semiconductor device is adapted to be conveyed to the heating unit from the loading unit and heated at the predetermined heat treatment temperature by the heating unit;
a cooling unit including at least two furnaces, the temperatures of which are individually controlled and decreased step by step and between the predetermined heat treatment temperature and a predetermined cooling temperature, wherein the semiconductor device is adapted to be conveyed to the cooling unit from the heating unit and cooled at the predetermined cooling temperature by the cooling unit; and
an unloading unit for discharging the semiconductor device, after uniformly cooling the semiconductor device at a predetermined unloading temperature.
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Accused Products
Abstract
Disclosed is a heat treatment system for semiconductor devices. The heat treatment system is used in a heat treatment process for semiconductor devices, such as a crystallization process for an amorphous silicon thin film or a dopant activation process for a poly-crystalline silicon thin film formed on a surface of a glass substrate of a flat display panel including a liquid crystal display (LCD) or an organic light emitting device (OLED). The heat treatment system transfers a semiconductor device after uniformly preheating the semiconductor device in order to prevent deformation of the semiconductor device during the heat treatment process, rapidly performs the heat treatment process under the high temperature condition by heating the semiconductor device using a lamp heater and induction heat derived from induced electromotive force, and unloads the semiconductor device after uniformly cooling the semiconductor device such that the semiconductor device is prevented from being deformed when the heat treatment process has been finished. The heat treatment system rapidly performs the heat treatment process while preventing deformation of the semiconductor device by gradually heating or cooling the semiconductor device.
336 Citations
51 Claims
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1. A heat treatment system for a semiconductor device, the heat treatment system comprising:
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a loading unit for conveying the semiconductor device and a support plate, on which the semiconductor device is rested, after preheating the semiconductor device and the support plate at a predetermined preheating temperature, wherein the loading unit includes a susceptor, which has at an upper center portion thereof insulative slots and on which the support plate is placed, a heating device for heating the susceptor, a lifting device for moving the susceptor up and down, and a horizontal conveyance device for horizontally moving the support plate; a heating unit including at least two furnaces, the temperatures of which are individually controlled and increased step by step up to a predetermined heat treatment temperature for the semiconductor device, wherein the semiconductor device is adapted to be conveyed to the heating unit from the loading unit and heated at the predetermined heat treatment temperature by the heating unit; a cooling unit including at least two furnaces, the temperatures of which are individually controlled and decreased step by step and between the predetermined heat treatment temperature and a predetermined cooling temperature, wherein the semiconductor device is adapted to be conveyed to the cooling unit from the heating unit and cooled at the predetermined cooling temperature by the cooling unit; and an unloading unit for discharging the semiconductor device, after uniformly cooling the semiconductor device at a predetermined unloading temperature. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48)
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49. A heat treatment system for a semiconductor device which is conveyed while being rested on a support plate, the heat treatment system comprising:
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a loading unit for heating the semiconductor device and the support plate at a predetermined preheating temperature, wherein the loading unit includes a susceptor, which is formed at an upper center portion thereof with insulative slots and on which the support plate is placed, a heating device for heating the susceptor, a lifting device for moving the susceptor up and down, and a horizontal conveyance device for horizontally moving the support plate.
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50. A heat treatment system for a semiconductor device which is conveyed while being rested on a support plate, the heat treatment system comprising:
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an unloading unit for discharging the semiconductor device and the support plate, which have been heat-treated, after uniformly cooling the semiconductor device and the support plate at a predetermined unloading temperature, wherein the unloading unit includes a cooling susceptor, which is formed at a predetermined region thereof with spraying holes for spraying gas and on which the support plate is rested, a gas spraying nozzle installed at one side of the cooling susceptor in order to spray gas onto the support plate and the semiconductor device with a predetermined spraying angle when the support plate and the semiconductor device are conveyed into the unloading unit, a lifting device for moving the cooling susceptor up and down, and a horizontal conveyance device for horizontally conveying the support plate. - View Dependent Claims (51)
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Specification