Deformable micromirror device
First Claim
1. A micromirror device for making an image display with digital image data, comprising:
- pixel elements, each of which makes pulse width modulation (PWM) for incident light depending on a deflection state of light and which are arranged in a form of a matrix, wherein;
each of said pixel elements has a mirror, and at least one memory cell comprising a transistor and a capacitor; and
a total value of a propagation delay time of a ROW line, which connects all of transistors of memory cells arranged successively in a ROW direction, and a switching time of each transistor is smaller than a driving interval of the ROW line driven in a minimum display duration of the micromirror device.
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Accused Products
Abstract
A micromirror device, which makes an image display with digital image data, comprises pixel elements each of which makes pulse width modulation for incident light depending on the deflection state of light and which are arranged in the form of a matrix. Each of the pixel elements has a mirror, and at least one memory cell comprising a transistor and a capacitor. In such a micromirror device, the total value of the propagation delay time of a ROW line, which connects all of transistors of memory cells arranged successively in a ROW direction, and the switching time of each transistor is smaller than the driving interval of the ROW line driven in the minimum display duration of the micromirror device.
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Citations
25 Claims
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1. A micromirror device for making an image display with digital image data, comprising:
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pixel elements, each of which makes pulse width modulation (PWM) for incident light depending on a deflection state of light and which are arranged in a form of a matrix, wherein; each of said pixel elements has a mirror, and at least one memory cell comprising a transistor and a capacitor; and a total value of a propagation delay time of a ROW line, which connects all of transistors of memory cells arranged successively in a ROW direction, and a switching time of each transistor is smaller than a driving interval of the ROW line driven in a minimum display duration of the micromirror device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A micromirror device for making an image display with digital image data, comprising:
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pixel elements, each of which makes pulse width modulation (PWM) for incident light depending on a deflection state of light and which are arranged in a form of an array, wherein; the array of said pixel elements is composed of B subsets each including pixel elements of Ms (COLUMNs)×
Ns (ROWs) (Ms, Ns and B are natural numbers);each of said pixel elements has a mirror, and at least one memory cell; a total value of a propagation delay time of a ROW line, which connects all of transistors of memory cells arranged successively in a ROW direction in each of the subsets, and a switching time of each transistor is smaller than a driving interval of the ROW line driven in a minimum display duration of the micromirror device. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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Specification