Analog interferometric modulator

• US 7,990,604 B2
• Filed: 06/15/2009
• Issued: 08/02/2011
• Est. Priority Date: 06/15/2009
• Status: Active Grant

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Mignard, Marc M., Lee, Chong U., Hong, John H., Govil, Alok
• Primary Examiner(s): Ben; Loha
• Application Number:
  US12/485,003
• Publication Number:
  US 20100315696A1
• Time in Patent Office: 778 Days
• Field of Search: 359290-295, 359/298, 359/245, 359/260, 359/263, 345/108, 324/511, 315/411, 430/35
• US Class Current: 359/295
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G09G 2320/0693 Calibration of display systems
• CPC Class Codes: G09G 3/3466 based on interferometric effect

Abstract

Methods and devices for calibrating and controlling the actuation of an analog interferometric modulator configured to have a plurality of actuation states. Devices and methods for calibrating an analog interferometric modulator to respond in linear relation to an applied voltage.

Claims

1. A device for modulating light, comprising:

a first layer;

a second layer, wherein a gap is present between the first and second layers and the first layer and second layer are stationary relative to each other;

a third layer disposed in the gap between the first and second layers; and

a control circuit configured to selectively induce an electric field between the first and second layers,

wherein the third layer is electrically isolated.

2. The device of claim 1, wherein at least one resistive element is disposed on the bottom of the first layer.

3. The device of claim 2, wherein the control circuit is configured to apply a first voltage when the device is in calibration mode, wherein the third layer contacts the resistive element of the first layer subsequent to the first voltage being applied.

4. The device of claim 1, further comprising a switch for selectively applying a charge to the third layer.

5. The device of claim 1, further comprising a thin film semiconductor or MEMS switch for selectively applying a charge to the third layer.

6. The device of claim 1, wherein the third layer comprises an optical mirror.

7. The device of claim 1, wherein the second layer comprises a thin optical absorber.

8. The device of claim 1, wherein the control circuit is configured to apply a first voltage when the device is in a calibration mode.

9. The device of claim 8, wherein subsequent to the first voltage being applied, an electrostatic force applied on the third layer is approximately equal to a mechanical restorative force applied on the third layer.

10. The device of claim 1, wherein control circuit is configured to apply a first voltage to the first layer and the second layer to induce the electric field.

11. The device of claim 1, wherein the third layer is configured to respond as a function of the electric field.

12. The device of claim 1, wherein the third layer is configured to respond in linear proportion to the electric field.

13. A method of calibrating an analog interferometric modulator, comprising:

providing a first electrode and a second electrode, wherein a gap is present between the first electrode and the second electrode;

applying a voltage to the first electrode and the second electrode; and

inducing a charge on a third electrode.

14. The method of claim 13, further comprising determining an amount of charge comprising:

providing at least one resistive element disposed on the first electrode;

applying a calibration voltage to the first electrode and the second electrode; and

adjusting the charge on the third electrode such that the force induced by the calibration voltage causes the third electrode to contact the at least one resistive element of the first electrode.

15. The method of claim 14, further comprising adjusting the charge on the third electrode such that the force induced by the calibration voltage about equals a mechanical restorative force applied to the third electrode.

16. The method of claim 13, wherein the inducing comprises inducing the charge on the third electrode such that the displacement of the third electrode responds as a function of the voltage.

17. The method of claim 13, wherein the inducing comprises inducing the charge on the third electrode such that the displacement of the third electrode responds in linear proportion to the voltage.

18. A device for modulating light, comprising:

first means for conducting current;

second means for conducting current, wherein a gap is present between the first conducting means and the second conducting means;

means for applying a voltage to the first conducting means and the second conducting means; and

means for inducing a charge on a third means for conducting current.

19. The device of claim 18, wherein the applying means comprises a control circuit.

20. The device of claim 18, wherein the inducing means comprises a charge pump.

21. The device of claim 18, further comprising a means for selectively applying a charge to the third conducting means.

22. The device of claim 21, wherein the means for selectively applying a charge comprises a switch.

23. The device of claim 21, wherein the means for selectively applying a charge comprises a thin film semiconductor.

24. The device of claim 18, wherein an insulating layer is disposed on the top of the second conducting means.

25. The device of claim 18, wherein a stiffening layer is disposed on the third conducting means.

26. The device of claim 18, wherein a capacitor is in communication with the third conducting means.

27. The device of claim 18, wherein the first conducting means comprises an electrode, the second conducting means comprises an electrode, and the third conducting means comprises an electrode.

28. The device of claim 18, wherein the means for inducing is further configured to induce the charge on the third means for conducting current such that the displacement of the third conducting means responds as a function of the voltage.

29. The device of claim 18, wherein the means for inducing is further configured to induce the charge on the third means for conducting current such that the displacement of the third conducting means responds in linear proportion to the voltage.