Advanced finishing control

• US 7,991,499 B2
• Filed: 10/29/2007
• Issued: 08/02/2011
• Est. Priority Date: 12/27/2006
• Status: Expired due to Fees

• Current Assignee: Semcon Tech LLC (IPNav)
• Original Assignee: Semcon Tech LLC (IPNav)
• Inventors: Molnar, Charles J.
• Primary Examiner(s): DeCady; Albert
• Assistant Examiner(s): Lee; Douglas S
• Application Number:
  US11/978,347
• Publication Number:
  US 20080306624A1
• Time in Patent Office: 1,373 Days
• Field of Search: 700/30, 700/31, 700/36, 700/99, 700/108, 700/117, 700/121, 703/12, 702/179, 702/182, 451/5, 451/36, 438690-693, 216 88- 91, 252/79.1
• US Class Current: 700/121
• CPC Class Codes: G05B 19/41875 characterised by quality surveillance of production
• CPC Class Codes: G05B 2219/32182 If state of tool, product deviates from standard, adjust system, feedback
• CPC Class Codes: G05B 2219/32201 Build statistical model of past normal proces, compare with actual process
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
• CPC Class Codes: Y02P 90/80 Management or planning

Abstract

A factory, an apparatus, and methods of using an in situ finishing information for finishing workpieces and semiconductor wafers are described. Changes or improvements to cost of manufacture of a workpiece using current in-process cost of manufacture information, tracked current in-process cost of manufacture information, or current cost of manufacture parameters are discussed. Appreciable changes to quality or cost of manufacture of a workpiece using tracking, using in-process tracked information, networks including a multiplicity of apparatus, and using in situ finishing information are discussed. A factory, apparatus, and methods to change or improve process control are discussed. A factory, apparatus, and methods to change or improve real-time process control are discussed. A factory, apparatus, and methods to change or improve feedforward and feedback control are discussed. The workpieces can be tracked individually or by process group such as a process batch.

Claims

1. A factory for manufacturing a workpiece comprising:

an at least one finishing apparatus “

A”

for an at least one finishing operation;

an at least one piece of workpiece fabrication machinery “

B”

other than the at least one finishing apparatus “

A”

;

an at least one piece of metrology equipment;

an at least one processor;

an at least one processor readable memory device;

an at least one operative computerized network connecting the at least one processor, the at least one processor readable memory device, the at least one finishing apparatus “

A”

, and the at least one piece of workpiece fabrication machinery “

B”

;

an at least one operative sensor for sensing an in situ finishing information; and

wherein the at least one processor readable memory device includes information in memory comprising (i) at least in part an at least one cost of manufacture model including at least in part an at least one current in-process cost of manufacture information at least in part related to the at least one finishing operation, (ii) the in situ finishing information, (iii) an at least one process model at least in part related to the at least one finishing operation, (iv) an information from the at least one piece of metrology equipment at least in part related to the at least one finishing operation, (v) an information at least in part related to the at least one finishing apparatus “

A”

, and (vi) an information at least in part related to the at least one workpiece fabrication machinery “

B” and

at least in part related to the at least one finishing operation; and

an at least one operative controller for controlling manufacturing operatively connected at least in part to the at least one processor readable memory device.

2. The factory according to claim 1 wherein the at least one piece of workpiece fabrication machinery “

B”

comprises a patterning apparatus and a cleaning apparatus and wherein the information in memory at least in part related to the at least one workpiece fabrication machinery “

B” and

at least in part related to the at least one finishing operation comprises an information at least in part related to the patterning apparatus, at least in part related to the cleaning apparatus, and at least in part related to the at least one finishing operation.

3. The factory according to claim 1 wherein the at least one piece of workpiece fabrication machinery “

B”

comprises an apparatus for forming a low-k dielectric on the workpiece and wherein the information in memory at least in part related to the at least one workpiece fabrication machinery “

B” and

at least in part related to the at least one finishing operation comprises an information at least in part related to the apparatus for forming the low-k dielectric on the workpiece and at least in part related to the at least one finishing operation.

4. The factory according to claim 1 wherein the at least one piece of workpiece fabrication machinery “

B”

comprises a patterning apparatus, a cleaning apparatus, and an apparatus for forming a low-k dielectric on the workpiece and wherein the information in memory at least in part related to the at least one workpiece fabrication machinery “

B” and

at least in part related to the at least one finishing operation comprises an information at least in part related to the apparatus for forming the low-k dielectric on the workpiece, at least in part related to the patterning apparatus, at least in part related to the cleaning apparatus, and at least in part related to the at least one finishing operation.

5. The factory according to claim 1 wherein the at least one processor readable memory device additionally includes at least in part an at least one business model.

6. The factory according to claim 1 wherein at least in part the at least one cost of manufacture model including at least in part the at least one current in-process cost of manufacture information at least in part related to the at least one finishing operation comprises at least in part an at least one cost of manufacture model including at least in part an at least one tracked current in-process cost of manufacture information at least in part related to the at least one finishing operation and wherein the at least one processor readable memory device additionally includes encoded instructions that when executed by the at least one processor determines a process control for the at least one operative controller using (i) at least in part the at least one cost of manufacture model including at least in part the at least one tracked current in-process cost of manufacture information at least in part related to the at least one finishing operation, (ii) the in situ finishing information, (iii) the at least one process model at least in part related to the at least one finishing operation, (iv) the information from the at least one piece of metrology equipment at least in part related to the at least one finishing operation, (v) the information at least in part related to the at least one finishing apparatus “

A”

, and (vi) the information at least in part related to the at least one workpiece fabrication machinery “

B” and

at least in part related to the at least one finishing operation.

7. The factory according to claim 1 wherein at least in part the at least one cost of manufacture model including at least in part the at least one current in-process cost of manufacture information at least in part related to the at least one finishing operation comprises at least in part an at least one cost of manufacture model including at least in part an at least one tracked current in-process cost of manufacture information at least in part related to the at least one finishing operation and wherein the at least one processor readable memory device additionally includes encoded instructions that when executed by the at least one processor determines a real-time a process control for the at least one operative controller using (i) at least in part the at least one cost of manufacture model including at least in part the at least one tracked current in-process cost of manufacture information at least in part related to the at least one finishing operation, (ii) the in situ finishing information, (iii) the at least one process model at least in part related to the at least one finishing operation, (iv) the information from the at least one piece of metrology equipment at least in part related to the at least one finishing operation, (v) the information at least in part related to the at least one finishing apparatus “

A”

, and (vi) the information at least in part related to the at least one workpiece fabrication machinery “

B” and

at least in part related to the at least one finishing operation.

8. A method for processing a workpiece in a factory, the method comprising:

providing i) an at least one finishing apparatus “

A”

for an at least one finishing operation, ii) an at least one piece of workpiece fabrication machinery “

B”

other than the at least one finishing apparatus “

A”

, iii) an at least one piece of metrology equipment, iv) an at least one processor readable memory device, v) an at least one operative computerized network connecting the at least one processor readable memory device, the at least one finishing apparatus “

A”

, the at least one piece of workpiece fabrication machinery “

B”

, and the at least one piece of metrology equipment;

finishing the workpiece with the at least one finishing apparatus;

sensing an in situ finishing information with an operative sensor;

determining a change for a process control parameter using an at least one processor, the at least one operative computerized network, and a family of processing information comprising (i) at least in part an at least one cost of manufacture model including at least in part an at least one current in-process cost of manufacture information, (ii) the in situ finishing information, (iii) an at least one process model at least in part related to the at least one finishing operation, (iv) an information from the at least one piece of metrology equipment at least in part related to the at least one finishing operation, (v) an information at least in part related to the at least one finishing apparatus “

A”

, and (vi) an information at least in part related to the at least one workpiece fabrication machinery “

B” and

at least in part related to the at least one finishing operation; and

changing the process control parameter to change a processing control with an operative controller and wherein the processing control comprises a processing control at least in part related to the at least one finishing operation.

9. The method of claim 8 wherein at least in part the at least one current in-process cost of manufacture information comprises at least in part an at least one tracked current in-process cost of manufacture information related to quality and at least in part related to the at least one finishing operation.

10. The method of claim 8 wherein at least in part the at least one cost of manufacture model including at least in part the at least one current in-process cost of manufacture information comprises at least in part an at least one cost of manufacture model including at least in part an at least one tracked current in-process cost of manufacture information at least in part related to the at least one finishing operation.

11. The method of claim 8 wherein the at least one piece of workpiece fabrication machinery “

B”

comprises a patterning apparatus and a cleaning apparatus and wherein the information at least in part related to the at least one workpiece fabrication machinery “

B” and

at least in part related to the at least one finishing operation comprises an information at least in part related to the patterning apparatus, at least in part related to the cleaning apparatus, and at least in part related to the at least one finishing operation.

12. A method for finishing a workpiece in a factory, the method comprising:

providing i) an at least one finishing apparatus “

A”

for an at least one finishing operation, ii) an at least one piece of workpiece fabrication machinery “

B”

other than the at least one finishing apparatus “

A”

, iii) an at least one piece of metrology equipment, iv) an at least one processor readable memory device, v) an at least one operative computerized network connecting the at least one processor readable memory device, the at least one finishing apparatus “

A”

, the at least one piece of workpiece fabrication machinery “

B”

, and the at least one piece of metrology equipment;

finishing the workpiece with the at least one finishing apparatus;

sensing an in situ finishing information with an operative sensor;

determining a change for a real-time process control parameter using an at least one processor, the at least one operative computerized network, and a family of processing information comprising (i) at least in part an at least one cost of manufacture model including at least in part an at least one current in-process cost of manufacture information at least in part related to the at least one finishing operation, (ii) the in situ finishing information, (iii) an at least one process model at least in part related to the at least one finishing operation, (iv) an information from the at least one piece of metrology equipment at least in part related to the at least one finishing operation, (v) an information at least in part related to the at least one finishing apparatus “

A”

, and (vi) an information at least in part related to the at least one workpiece fabrication machinery “

B” and

at least in part related to the at least one finishing operation; and

changing the real-time process control parameter to change a real-time processing control with an operative controller and wherein the real-time processing control comprises a real-time processing control at least in part related to the at least one finishing operation.

13. The method of claim 12 wherein at least in part the at least one cost of manufacture model including at least in part the at least one current in-process cost of manufacture information at least in part related to the at least one finishing operation comprises at least in part an at least one cost of manufacture model including at least in part an at least one tracked current in-process cost of manufacture information at least in part related to the at least one finishing operation.

14. A method for processing a workpiece, the method comprising:

providing a manufacturing process control information for a finishing operation previously used by an at least one processor for an at least one process control and wherein the manufacturing process control information comprises manufacturing process control information at least in part from an operative network including an at least one finishing apparatus “

A”

for an at least one finishing operation, an at least one piece of workpiece fabrication machinery “

B”

other than the at least one finishing apparatus “

A”

, and an at least one piece of metrology equipment and wherein the manufacturing process control information includes information members comprising (i) at least in part an at least one cost of manufacture model including at least in part an at least one current in-process cost of manufacture information at least in part related to the at least one finishing operation, (ii) an in situ finishing information from an operative sensor, (iii) an at least one process model at least in part related to the at least one finishing operation, (iv) an information from the at least one piece of metrology equipment at least in part related to the at least one finishing operation, (v) an information at least in part related to the at least one finishing apparatus “

A”

, and (vi) an information at least in part related to the at least one workpiece fabrication machinery “

B” and

at least in part related to the at least one finishing operation;

supplying the manufacturing process control information to an at least one computer;

using the at least one computer to determine a change to an at least one information member in the manufacturing process control information;

changing the at least one information member in the manufacturing process control information forming a changed manufacturing process control information; and

supplying the changed manufacturing process control information for a changed process control for use in an at least one operative controller for controlling a manufacturing operation at least in part related to the at least one finishing operation.

15. The method of claim 14 wherein the at least one piece of workpiece fabrication machinery “

B”

comprises an apparatus for forming a low-k dielectric on the workpiece and a patterning apparatus and wherein the information at least in part related to the at least one piece of workpiece fabrication machinery “

B” and

at least in part related to the at least one finishing operation comprises an information at least in part related to the apparatus for forming a low-k dielectric on the workpiece, at least in part related to the patterning apparatus, and at least in part related to the at least one finishing operation.

16. The method of claim 14 additionally comprising:

storing the changed manufacturing process control information; and

using the changed manufacturing control information for the changed process control during the manufacturing operation at least in part related to the at least one finishing operation.

17. The method of claim 14 wherein at least in part the at least one cost of manufacture model including at least in part the at least one current in-process cost of manufacture information at least in part related to the at least one finishing operation comprises at least in part an at least one cost of manufacture model including at least in part an at least one tracked current in-process cost of manufacture information at least in part related to the at least one finishing operation.

18. The method of claim 17 additionally comprising:

storing the changed manufacturing process control information; and

using the changed manufacturing process control information for the changed process control during the manufacturing operation at least in part related to the at least one finishing operation.

19. The method of claim 17 additionally comprising:

storing the changed manufacturing process control information; and

using the changed manufacturing process control information for at least in part determining an appreciable change for a process model at least in part related to the at least one finishing operation; and

changing the process model forming a changed process model at least in part related to the at least one finishing operation.

20. The method of claim 19 additionally comprising:

storing the changed process model at least in part related to the at least one finishing operation; and

using the changed process model at least in part related to the at least one finishing operation for the changed process control during the manufacturing operation at least in part related to the at least one finishing operation.

21. The method of claim 14 wherein at least in part the at least one current in-process cost of manufacture information at least in part related to the at least one finishing operation comprises at least in part an at least one cost one current in-process cost of manufacture information at least in part related to quality and at least in part related to the at least one finishing operation.

22. A method for processing a workpiece, the method comprising:

providing a manufacturing process control information for a finishing operation previously used by an at least one processor for an at least one real-time process control and wherein the manufacturing process control information comprises manufacturing process control information at least in part from an operative network including an at least one finishing apparatus “

A”

for an at least one finishing operation, an at least one piece of workpiece fabrication machinery “

B”

other than the at least one finishing apparatus “

A”

, and an at least one piece of metrology equipment and wherein the manufacturing process control information includes information members comprising (i) at least in part an at least one cost of manufacture model including at least in part an at least one current in-process cost of manufacture information at least in part related to the at least one finishing operation, (ii) an in situ finishing information from an operative sensor, (iii) an at least one process model, (iv) an information from the at least one piece of metrology equipment at least in part related to the at least one finishing operation, (v) an information at least in part related to the at least one finishing apparatus “

A”

, and (vi) an information at least in part related to the at least one workpiece fabrication machinery “

B” and

at least in part related to the at least one finishing operation;

supplying the manufacturing process control information to an at least one computer;

using the at least one computer to determine a change to an at least one information member in the manufacturing process control information;

changing the at least one information member in the manufacturing process control information forming a changed manufacturing process control information; and

supplying the changed manufacturing process control information for a changed real-time process control for use in an at least one operative controller for controlling a manufacturing operation at least in part related to the at least one finishing operation.

23. The method of claim 22 additionally comprising:

storing the changed manufacturing process control information; and

using the changed manufacturing process control information for the changed real-time process control during the manufacturing operation at least in part related to the at least one finishing operation.

24. The method of claim 22 wherein at least in part the at least one cost of manufacture model including at least in part the at least one current in-process cost of manufacture information related to the finishing operation comprises at least in part an at least one cost of manufacture model including at least in part an at least one tracked current in-process cost of manufacture information at least in part related to the at least one finishing operation.

25. The method of claim 22 wherein at least in part the at least one current in-process cost of manufacture information comprises at least in part an at least one current in-process cost of manufacture information related to quality and at least in part to the at least one finishing operation.