Process of manufacturing a piezoelectric actuator for tunable electronic components on a carrier substrate
First Claim
1. A process for forming a carrier substrate containing a membrane, a conductive layer, and piezoelectric actuators, comprising the steps of:
- providing a substrate having a bottom protective layer on a bottom side and etched trenches on a top side;
depositing a top protective layer on the top side of the substrate;
depositing a first conductive layer on the top protective layer;
patterning the first conductive layer;
patterning the bottom protective layer to form an etch mask aligned with the patterned first conductive layer;
forming a piezoelectric structure on the top side of the substrate;
depositing a membrane layer along the top side of the substrate and above the piezoelectric structure;
curing the membrane layer;
depositing a second conductive layer on the cured membrane layer;
depositing a protective photoresist layer on the second conductive layer;
patterning and hard-baking the photoresist layer;
removing a portion of the substrate from the bottom side of the substrate, forming an etched opening in the substrate;
removing a portion of the top protective layer;
removing a portion of the second conductive layer to form a patterned second conductive layer; and
removing the patterned photoresist layer.
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Accused Products
Abstract
A processes for manufacturing actuating assembly for tuning a circuit by forming a carrier substrate containing a membrane, a conductive layer, and piezoelectric actuators are disclosed. The process includes the steps of: providing a substrate having a bottom protective layer on a bottom side and etched trenches on a top side; depositing a top protective layer on the top side of the substrate; depositing a first conductive layer on the top protective layer; patterning the first conductive layer; patterning the bottom protective layer to form an etch mask aligned with the patterned first conductive layer; forming a piezoelectric structure on the top side of the substrate; depositing a membrane layer along the top side of the substrate and above the piezoelectric structure; curing the membrane layer; depositing a second conductive layer on the cured membrane layer; depositing a protective photoresist layer on the second conductive layer; patterning and hard-baking the photoresist layer; removing a portion of the substrate from the bottom side of the substrate, forming an etched opening in the substrate; removing a portion of the top protective layer; removing a portion of the second conductive layer to form a patterned second conductive layer; and removing the patterned photoresist layer. Changes in shape of the resulting piezoelectric arrangement allow a deflection of the membrane and a corresponding controllable upward or downward movement of the conductive element.
61 Citations
18 Claims
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1. A process for forming a carrier substrate containing a membrane, a conductive layer, and piezoelectric actuators, comprising the steps of:
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providing a substrate having a bottom protective layer on a bottom side and etched trenches on a top side; depositing a top protective layer on the top side of the substrate; depositing a first conductive layer on the top protective layer; patterning the first conductive layer; patterning the bottom protective layer to form an etch mask aligned with the patterned first conductive layer; forming a piezoelectric structure on the top side of the substrate; depositing a membrane layer along the top side of the substrate and above the piezoelectric structure; curing the membrane layer; depositing a second conductive layer on the cured membrane layer; depositing a protective photoresist layer on the second conductive layer; patterning and hard-baking the photoresist layer; removing a portion of the substrate from the bottom side of the substrate, forming an etched opening in the substrate; removing a portion of the top protective layer; removing a portion of the second conductive layer to form a patterned second conductive layer; and removing the patterned photoresist layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification