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Component and method for its manufacture

  • US 7,992,442 B2
  • Filed: 11/02/2009
  • Issued: 08/09/2011
  • Est. Priority Date: 11/03/2008
  • Status: Active Grant
First Claim
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1. A component for measuring pressure, comprising:

  • a glass carrier; and

    a micromechanical sensor element that is bonded onto the glass carrier, an upper side of the glass carrier acting as a connection surface for the sensor element, and a rear side, opposite the upper side, of the glass carrier acting as an mounting surface for the component, and the glass carrier having lateral surfaces that connect the upper side and the rear side;

    wherein the glass carrier is formed by a segment of a glass wafer into which at least contours of the glass carrier were stamped, so that at least the areas produced in this way of the lateral surfaces of the glass carrier and the rear side of the glass carrier have a surface that is largely closed and free of microcracks.

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