Semiconductor element and display device using the same

• US 7,994,504 B2
• Filed: 07/31/2009
• Issued: 08/09/2011
• Est. Priority Date: 04/09/2002
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Murakami, Satoshi, Hayakawa, Masahiko, Yamazaki, Shunpei
• Primary Examiner(s): Lee; Eugene
• Assistant Examiner(s): Ho; Anthony
• Application Number:
  US12/533,669
• Publication Number:
  US 20100025688A1
• Time in Patent Office: 739 Days
• Field of Search: 257/59, 257/72, 257/40, 438/149, 438/151
• US Class Current: 257/59
• CPC Class Codes: G02F 1/133512 Light shielding layers, e.g. black matrix G02F1/136209 takes precedence
• CPC Class Codes: G02F 1/1337 Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
• CPC Class Codes: G02F 1/1339 Gaskets; Spacers; Sealing of cells
• CPC Class Codes: G02F 1/1341 Filling or closing of cells
• CPC Class Codes: G02F 1/13439 characterised by their electrical, optical, physical properties; materials therefor; method of making
• CPC Class Codes: G02F 1/136213 Storage capacitors associated with the pixel electrode
• CPC Class Codes: G02F 1/136227 Through-hole connection of the pixel electrode to the active element through an insulation layer
• CPC Class Codes: G02F 1/136286 Wiring, e.g. gate line, drain line
• CPC Class Codes: G02F 1/1368 in which the switching element is a three-electrode device G02F1/136277 takes precedence
• CPC Class Codes: G02F 2201/123 pixel
• CPC Class Codes: H01L 23/3171 the coating being directly applied to the semiconductor body, e.g. passivation layer H01L23/3178 takes precedence
• CPC Class Codes: H01L 23/49827 Via connections through the substrates, e.g. pins going through the substrate, coaxial cables H01L23/49822, H01L23/49833, H01L23/4985, H01L23/49861 take precedence
• CPC Class Codes: H01L 27/1218 with a particular composition or structure of the substrate
• CPC Class Codes: H01L 27/124 with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits wiring structures per se H01L23/52
• CPC Class Codes: H01L 27/1248 with a particular composition or shape of the interlayer dielectric specially adapted to the circuit arrangement
• CPC Class Codes: H01L 29/41733 for thin film transistors with insulated gate
• CPC Class Codes: H01L 29/42384 for thin film field effect transistors, e.g. characterised by the thickness or the shape of the insulator or the dimensions, the shape or the lay-out of the conductor
• CPC Class Codes: H01L 29/66757 Lateral single gate single channel transistors with non-inverted structure, i.e. the channel layer is formed before the gate
• CPC Class Codes: H01L 29/66765 Lateral single gate single channel transistors with inverted structure, i.e. the channel layer is formed after the gate
• CPC Class Codes: H01L 29/786 Thin film transistors, i.e. transistors with a channel being at least partly a thin film transistors having only the source or the drain region on an insulator layer H01L29/0653; thin film FinFETs H01L29/785
• CPC Class Codes: H01L 29/78606 : with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device H01L29/78642, H01L29/78645 take precedence
• CPC Class Codes: H01L 29/78651 : Silicon transistors H01L29/78606 - H01L29/78645 take precedence
• CPC Class Codes: H01L 2924/00 : Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 : Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H10K 2102/3026 : Top emission
• CPC Class Codes: H10K 2102/311 : Flexible OLED
• CPC Class Codes: H10K 59/123 : Connection of the pixel electrodes to the thin film transistors [TFT]
• CPC Class Codes: H10K 59/124 : Insulating layers formed between TFT elements and OLED elements
• CPC Class Codes: H10K 59/131 : Interconnections, e.g. wiring lines or terminals
• CPC Class Codes: Y10S 438/95 : Multilayer mask including nonradiation sensitive layer

Abstract

Provided is a semiconductor element including: a semiconductor having an active layer; a gate insulating film which is in contact with the semiconductor; a gate electrode opposite to the active layer through the gate insulating film; a first nitride insulating film formed over the active layer, a photosensitive organic resin film formed on the first nitride insulating film; a second nitride insulating film formed on the photosensitive organic resin film; and a wiring provided on the second nitride insulating film, in which a first opening portion is provided in the photosensitive organic resin film, an inner wall surface of the first opening portion is covered with the second nitride insulating film, a second opening portion is provided in a laminate including the gate insulating film, the first nitride insulating film, and the second nitride insulating film inside the first opening portion, and the semiconductor is connected with the wiring through the first opening portion and the second opening portion.

Claims

1. A semiconductor device comprising:

a gate electrode;

a gate insulating film over the gate electrode;

a channel region over the gate electrode with the gate insulating film therebetween;

a source region and a drain region with the channel region therebetween;

an electrode on one of the source region and the drain region;

an inorganic insulating film comprising silicon nitride over the electrode, the inorganic insulating film including a first opening to expose a portion of the electrode;

an organic resin film over the inorganic insulating film, the organic resin film including a second opening wherein the second opening is overlapped with the first opening so as to expose a portion of a top surface of the inorganic insulating film around the first opening; and

a pixel electrode over the organic resin film,

wherein the organic resin film has a convex inner wall surface in the second opening, and

wherein the pixel electrode contacts the electrode through the first opening and the second opening.

2. The semiconductor device according to claim 1, wherein the inorganic insulating film has a laminate structure.

3. The semiconductor device according to claim 1, wherein the pixel electrode comprises an oxide conductive film which is transparent with respect to visible light.

4. The semiconductor device according to claim 1, wherein the source region, the drain region, and the channel region are formed in one semiconductor film.

5. The semiconductor device according to claim 1, further comprising a second inorganic insulating film between the organic resin film and the pixel electrode.

6. The semiconductor device according to claim 1, wherein a curvature radius of the convex inner wall surface is 3 μ

m to 30 μ

m.

7. The semiconductor device according to claim 1, wherein a curvature radius of the convex inner wall surface is continuously changed.

8. The semiconductor device according to claim 1, wherein the electrode comprises metal.

9. A semiconductor device comprising:

a gate electrode;

a gate insulating film over the gate electrode;

a channel region over the gate electrode with the gate insulating film therebetween;

a source region and a drain region with the channel region therebetween;

an electrode on one of the source region and the drain region;

an inorganic insulating film comprising silicon nitride over the electrode, the inorganic insulating film including a first opening to expose a portion of the electrode;

an organic resin film over the inorganic insulating film, the organic resin film including a second opening wherein the second opening is overlapped with the first opening in such a manner that an edge of the second opening at a bottom of the second opening surrounds an edge of the first opening at a top of the first opening and the edge of the second opening is located outside the edge of the first opening;

a pixel electrode over the organic resin film,

wherein the organic resin film has a convex inner wall surface in the second opening, and

wherein the pixel electrode contacts the electrode through the first opening and the second opening.

10. The semiconductor device according to claim 9, wherein the inorganic insulating film has a laminate structure.

11. The semiconductor device according to claim 9, wherein the pixel electrode comprises an oxide conductive film which is transparent with respect to visible light.

12. The semiconductor device according to claim 9, wherein the source region, the drain region, and the channel region are formed in one semiconductor film.

13. The semiconductor device according to claim 9, further comprising a second inorganic insulating film between the organic resin film and the pixel electrode.

14. The semiconductor device according to claim 9, wherein a curvature radius of the convex inner wall surface is 3 μ

m to 30 μ

m.

15. The semiconductor device according to claim 9, wherein a curvature radius of the convex inner wall surface is continuously changed.

16. The semiconductor device according to claim 9, wherein the electrode comprises metal.

17. A semiconductor device comprising:

a gate electrode;

a gate insulating film over the gate electrode;

a channel region over the gate electrode with the gate insulating film therebetween;

a source region and a drain region with the channel region therebetween;

an electrode electrically connected to one of the source region and the drain region;

an inorganic insulating film comprising silicon nitride over the electrode, the inorganic insulating film including a first opening to expose a portion of the electrode;

an organic resin film over the inorganic insulating film, the organic resin film including a second opening wherein the second opening is overlapped with the first opening in such a manner that an edge of the second opening at a bottom of the second opening surrounds an edge of the first opening at a top of the first opening and the edge of the second opening is located outside the edge of the first opening;

a pixel electrode over the organic resin film,

wherein the organic resin film has a convex inner wall surface in the second opening, and

wherein the pixel electrode contacts the electrode through the first opening and the second opening.

18. The semiconductor device according to claim 17, wherein the inorganic insulating film has a laminate structure.

19. The semiconductor device according to claim 17, wherein the pixel electrode comprises an oxide conductive film which is transparent with respect to visible light.

20. The semiconductor device according to claim 17, wherein the source region, the drain region, and the channel region are formed in one semiconductor film.

21. The semiconductor device according to claim 17, further comprising a second inorganic insulating film between the organic resin film and the pixel electrode.

22. The semiconductor device according to claim 17, wherein a curvature radius of the convex inner wall surface is 3 μ

m to 30 μ

m.

23. The semiconductor device according to claim 17, wherein a curvature radius of the convex inner wall surface is continuously changed.

24. The semiconductor device according to claim 17, wherein the electrode comprises metal.

25. A semiconductor device comprising:

a gate electrode;

a gate insulating film over the gate electrode;

a channel region over the gate electrode with the gate insulating film therebetween;

a source region and a drain region with the channel region therebetween;

an electrode on one of the source region and the drain region;

an inorganic insulating film comprising silicon nitride over the electrode, the inorganic insulating film including a first opening to expose a portion of the electrode;

an organic resin film over the inorganic insulating film, the organic resin film including a second opening; and

a pixel electrode over the organic resin film,

wherein a portion of a top surface of the inorganic insulating film is inside the second opening so that the portion of the top surface of the inorganic insulating film is not covered with the organic resin film at a bottom of the second opening,

wherein the organic resin film has a convex inner wall surface in the second opening, and

wherein the pixel electrode contacts the electrode through the first opening and the second opening.

26. The semiconductor device according to claim 25, wherein the inorganic insulating film has a laminate structure.

27. The semiconductor device according to claim 25, wherein the pixel electrode comprises an oxide conductive film which is transparent with respect to visible light.

28. The semiconductor device according to claim 25, wherein the source region, the drain region, and the channel region are formed in one semiconductor film.

29. The semiconductor device according to claim 25, further comprising a second inorganic insulating film between the organic resin film and the pixel electrode.

30. The semiconductor device according to claim 25, wherein a curvature radius of the convex inner wall surface is 3 μ

m to 30 μ

m.

31. The semiconductor device according to claim 25, wherein a curvature radius of the convex inner wall surface is continuously changed.

32. The semiconductor device according to claim 25 wherein the electrode comprises metal.

33. A semiconductor device comprising:

a bottom gate type thin film transistor including at least a channel region, a source region and a drain region;

an electrode on one of the source region and the drain region;

an inorganic insulating film comprising silicon nitride over the electrode, the inorganic insulating film including a first opening to expose a portion of the electrode;

an organic resin film over the inorganic insulating film, the organic resin film including a second opening wherein the second opening is overlapped with the first opening so as to expose a portion of a top surface of the inorganic insulating film around the first opening; and

a pixel electrode over the organic resin film,

wherein the organic resin film has a curved inner wall surface in the second opening, and

wherein the pixel electrode contacts the electrode through the first opening and the second opening.

34. The semiconductor device according to claim 33, wherein the inorganic insulating film has a laminate structure.

35. The semiconductor device according to claim 33, wherein the pixel electrode comprises an oxide conductive film which is transparent with respect to visible light.

36. The semiconductor device according to claim 33, wherein the source region, the drain region, and the channel region are formed in one semiconductor film.

37. The semiconductor device according to claim 33, further comprising a second inorganic insulating film between the organic resin film and the pixel electrode.

38. The semiconductor device according to claim 33, wherein a curvature radius of the curved inner wall surface is 3 μ

m to 30 μ

m.

39. The semiconductor device according to claim 33, wherein a curvature radius of the curved inner wall surface is continuously changed.

40. The semiconductor device according to claim 33, wherein the electrode comprises metal.

41. A semiconductor device comprising:

a bottom gate type thin film transistor including at least a channel region, a source region and a drain region;

an electrode on one of the source region and the drain region;

an inorganic insulating film comprising silicon nitride over the electrode, the inorganic insulating film including a first opening to expose a portion of the electrode;

an organic resin film over the inorganic insulating film, the organic resin film including a second opening wherein the second opening is overlapped with the first opening in such a manner that an edge of the second opening at a bottom of the second opening surrounds an edge of the first opening at a top of the first opening and the edge of the second opening is located outside the edge of the first opening; and

a pixel electrode over the organic resin film,

wherein the organic resin film has a curved inner wall surface in the second opening, and

wherein the pixel electrode contacts the electrode through the first opening and the second opening.

42. The semiconductor device according to claim 41, wherein the inorganic insulating film has a laminate structure.

43. The semiconductor device according to claim 41, wherein the pixel electrode comprises an oxide conductive film which is transparent with respect to visible light.

44. The semiconductor device according to claim 41, wherein the source region, the drain region, and the channel region are formed in one semiconductor film.

45. The semiconductor device according to claim 41, further comprising a second inorganic insulating film between the organic resin film and the pixel electrode.

46. The semiconductor device according to claim 41, wherein a curvature radius of the curved inner wall surface is 3 μ

m to 30 μ

m.

47. The semiconductor device according to claim 41, wherein a curvature radius of the curved inner wall surface is continuously changed.

48. The semiconductor device according to claim 41, wherein the electrode comprises metal,

a strain point of the glass substrate by 50 to 200°

C.