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MEMS-based quartz hybrid filters and a method of making the same

  • US 7,994,877 B1
  • Filed: 11/10/2008
  • Issued: 08/09/2011
  • Est. Priority Date: 11/10/2008
  • Status: Active Grant
First Claim
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1. An integrated Micro-Electro-Mechanical Systems (MEMS) device comprising:

  • a first substrate having a first end and a second end, the first end bonded to a base substrate and the second end of first substrate cantilevered over the base substrate and separated from the base substrate by a gap;

    an inductive element having a coil, wherein the coil of the inductive element is on the first substrate; and

    a capacitive element having two conductive plates, wherein one of the two conductive plates is on the first substrate.

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