MEMS-based quartz hybrid filters and a method of making the same
First Claim
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1. An integrated Micro-Electro-Mechanical Systems (MEMS) device comprising:
- a first substrate having a first end and a second end, the first end bonded to a base substrate and the second end of first substrate cantilevered over the base substrate and separated from the base substrate by a gap;
an inductive element having a coil, wherein the coil of the inductive element is on the first substrate; and
a capacitive element having two conductive plates, wherein one of the two conductive plates is on the first substrate.
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Abstract
An integrated Micro-Electro-Mechanical Systems (MEMS) filter includes an insulating substrate bonded to a base substrate such that at least a portion of the insulating substrate is separated from the base substrate by a gap, the insulating substrate having a first side and a second side, an inductive element having a coil, wherein the coil of the inductive element is on the insulating substrate, and a capacitive element having two conductive plates, wherein one of the two conductive plates is on the insulating substrate.
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Citations
13 Claims
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1. An integrated Micro-Electro-Mechanical Systems (MEMS) device comprising:
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a first substrate having a first end and a second end, the first end bonded to a base substrate and the second end of first substrate cantilevered over the base substrate and separated from the base substrate by a gap; an inductive element having a coil, wherein the coil of the inductive element is on the first substrate; and a capacitive element having two conductive plates, wherein one of the two conductive plates is on the first substrate. - View Dependent Claims (2, 3, 4, 5, 6, 13)
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7. An integrated Micro-Electro-Mechanical Systems (MEMS) filter comprising:
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an insulating substrate having a first end and a second end, the first end bonded to a base substrate and the second end of the insulating substrate cantilevered over the base substrate and separated from the base substrate by a gap; a resonator element on the second end of the insulating substrate; an inductive element having a coil, wherein the coil of the inductive element is on the insulating substrate; and a capacitive element having two conductive plates, wherein one of the two conductive plates is on the insulating substrate. - View Dependent Claims (8, 9, 10, 11, 12)
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Specification