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MEMS force balance accelerometer

  • US 7,997,136 B2
  • Filed: 10/08/2008
  • Issued: 08/16/2011
  • Est. Priority Date: 10/08/2008
  • Status: Active Grant
First Claim
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1. A microelectromechanical (MEMS) accelerometer comprising:

  • a housing;

    a proof mass suspended within the housing by at least one flexure;

    at least one planar coil located on the proof mass;

    at least one magnet;

    a first pole piece adjacent to at least one of the at least one magnets; and

    a second pole piece,wherein at least one face of the first pole piece is positioned proximate a first side of the proof mass and at least one face of the second pole piece is positioned proximate a second side of the proof mass such that a magnetic flux field passes from the magnet, through the face of the first pole piece, through the at least one planar coil at a flux angle between approximately 30 degrees and approximately 60 degrees relative to a coil plane, and into the second pole piece.

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