MEMS G-switch device
First Claim
1. A MEMS G-switch comprising:
- a silicon substrate;
a proof mass;
one or more moveable driving stages attached to said proof mass;
a plurality of mechanical springs each having one end attached to said substrate and another end attached to said one or more moveable driving stages;
one or more fixed driving stages attached to said substrate;
bumps attached on said moveable driving stages or said fixed driving stages; and
a voltage control circuit applying voltage between said moveable driving stages and said fixed driving stages wherein said G-switch is turned off when it is in an orientation perpendicular to the direction of gravity and said one or more moveable driving stages deviate from said one or more fixed driving stages, and wherein said G-switch is turned on when it is in an orientation parallel to the direction of gravity and the gravity force of said proof mass pulls said one or more moveable driving stages to collapse onto said one or more fixed driving stages.
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Accused Products
Abstract
A Micro Electro Mechanical Systems (MEMS) G-switch includes one or more actuators formed between fixed driving stages and moveable driving stages. A proof mass is attached to the moveable driving stages and flexibly attached to a substrate through one or more spring members. A voltage control circuit applies working voltages to the driving stages. With a first working voltage applied between the moveable and the fixed driving stages, moving of the driving stages'"'"' sensing direction towards gravity at a first critical angle will cause moveable driving stages to collapse and touch the fixed driving stage on the substrate and thus turn on the MEMS G-switch. After turning on the G-switch, a second working voltage is applied and moving of the driving stages'"'"' sensing direction away from gravity at a second critical angle will cause moveable electrodes to deviate from the fixed electrodes and thus turn off the MEMS G-switch.
19 Citations
29 Claims
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1. A MEMS G-switch comprising:
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a silicon substrate; a proof mass; one or more moveable driving stages attached to said proof mass; a plurality of mechanical springs each having one end attached to said substrate and another end attached to said one or more moveable driving stages; one or more fixed driving stages attached to said substrate; bumps attached on said moveable driving stages or said fixed driving stages; and a voltage control circuit applying voltage between said moveable driving stages and said fixed driving stages wherein said G-switch is turned off when it is in an orientation perpendicular to the direction of gravity and said one or more moveable driving stages deviate from said one or more fixed driving stages, and wherein said G-switch is turned on when it is in an orientation parallel to the direction of gravity and the gravity force of said proof mass pulls said one or more moveable driving stages to collapse onto said one or more fixed driving stages. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A MEMS G-switch comprising:
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a substrate; a proof-mass; a fixed driving stage attached to said substrate; a plurality of mechanical springs; a moveable driving stage attached to said proof mass and suspended above said substrate by said plurality of mechanical springs; a voltage control circuit applying working voltage to said moveable and fixed driving stages; and a bump attached between said fixed and said moveable driving stages; wherein, when said MEMS G-switch is turned off, a first working voltage is applied to said moveable driving stage, thereby moving said moveable driving stage'"'"'s sensing direction towards gravity at a first critical angle, thereby causing said movable driving stage to touch said fixed driving stage through said bump, and thereby turning on said MEMS G-switch; and wherein, when said MEMS G-switch is turned on, a second working voltage is applied to said moveable driving stage, thereby moving said moveable driving stage'"'"'s sensing direction away from gravity at a second critical angle, thereby causing said movable driving stage to separate from said fixed driving stage, and thereby turning off said MEMS G-switch. - View Dependent Claims (13, 14, 15)
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16. A MEMS G-switch comprising:
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a substrate; a proof-mass; one or more moveable driving stages attached to said proof mass; a plurality of mechanical springs each having one end attached to said substrate and another end attached to said moveable driving stages; one or more fixed driving stages attached to said substrate; bumps attached on said fixed driving stages or said moveable driving stages; and a voltage control circuit applying voltage between said moveable driving stages and said fixed driving stages; wherein, when a sensing direction of said one or more moveable driving stages is moved away from gravity at a second critical angle, said one or more moveable driving stages are separated from said one or more fixed driving stages and a first working voltage is applied to them by said voltage control circuit, and said MEMS G-switch is turned off; and wherein, when a sensing direction of said one or more moveable driving stages is moved towards gravity at a first critical angle, said one or more moveable driving stages touch said fixed driving stages through said bumps and a second working voltage is applied to them by said voltage control circuit, and said MEMS G-switch is turned on.
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17. A method for manufacturing a MEMS G-switch comprising:
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providing a substrate; forming a proof-mass in or above said substrate; providing one or more fixed driving stages attached to said substrate; attaching one or more moveable driving stages to said proof mass; providing a plurality of mechanical springs to suspend said one or more moveable driving stages above said substrate; providing one or more bumps attached between said fixed and said moveable driving stages; and providing a voltage control circuit to control two working voltages applied to said one or more driving stages alternatively wherein said G-switch is turned off when it is in an orientation perpendicular to the direction of gravity and said one or more moveable driving stages deviate from said one or more fixed driving stages and wherein said G-switch is turned on when it is in an orientation parallel to the direction of gravity and the gravity force of said proof mass pulls said one or more moveable driving stages to collapse onto said one or more fixed driving stages. - View Dependent Claims (18, 19, 20, 21, 22)
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23. A MEMS G-switch comprising:
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a substrate; a proof-mass formed through said substrate wherein a top surface of said substrate forms a fixed driving stage; one or more movable driving stages located over said top surface of said substrate and connected by first beams to said proof-mass wherein second beams are connected between each of said one or more moveable driving stages and an anchor attached to said top surface of said substrate; a voltage control circuit applying working voltage to said moveable driving stages; and a bump attached between said fixed and said moveable driving stages; wherein, when said MEMS G-switch is turned off, a first working voltage is applied to said one or more moveable driving stages, thereby moving said moveable driving stage'"'"'s sensing direction towards gravity at a first critical angle, thereby causing said one or more movable driving stage to touch said fixed driving stage through said bump, and thereby turning on said MEMS G-switch; and wherein, when said MEMS G-switch is turned on, a second working voltage is applied to said one or more moveable driving stages, thereby moving said one or more moveable driving stages'"'"' sensing direction away from gravity at a second critical angle, thereby causing said one or more movable driving stages to separate from said fixed driving stage, and thereby turning off said MEMS G-switch. - View Dependent Claims (24, 25, 26, 27, 28, 29)
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Specification