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Movable body system, pattern formation apparatus, exposure apparatus and exposure method, and device manufacturing method

  • US 7,999,918 B2
  • Filed: 09/28/2007
  • Issued: 08/16/2011
  • Est. Priority Date: 09/29/2006
  • Status: Active Grant
First Claim
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1. A movable body system, the system comprising:

  • a movable body that is movable in a predetermined plane, and has a holding member which holds an object, and a grating attached or formed on a surface of the movable body, in a plane substantially parallel to the predetermined plane and under the holding member; and

    a measurement system that irradiates light from outside of the movable body onto the grating via inside the movable body and receives reflected light from the grating via the inside to measure positional information of the movable body in a measurement direction in the predetermined plane, the irradiated light moving on the grating according to the movement of the movable body,wherein the measurement system irradiates the light onto the grating via a side surface of the movable body intersecting the predetermined plane.

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