Movable body system, pattern formation apparatus, exposure apparatus and exposure method, and device manufacturing method

• US 7,999,918 B2
• Filed: 09/28/2007
• Issued: 08/16/2011
• Est. Priority Date: 09/29/2006
• Status: Active Grant

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Shibazaki, Yuichi
• Primary Examiner(s): Nguyen; Hung Henry
• Assistant Examiner(s): WHITESELL GORDON, STEVEN H
• Application Number:
  US11/905,379
• Publication Number:
  US 20080094594A1
• Time in Patent Office: 1,418 Days
• Field of Search: 355/53, 355/72, 356445-448, 356/493, 356/494, 356/496, 356/498, 356/499, 356/614, 356/615, 356/622, 356/401
• US Class Current: 355/72
• CPC Class Codes: G01D 5/266 by interferometric means G01D5/353 takes precedence
• CPC Class Codes: G01D 5/305 controlling the movement of a following part
• CPC Class Codes: G03F 7/70758 Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
• CPC Class Codes: G03F 7/70775 Position control, e.g. interferometers or encoders for determining the stage position

Abstract

A laser beam emitted by an encoder main body enters a wafer table via a PBS from the outside, and reaches a grating at a point that is located right under exposure area, and is diffracted by the grating. Then, by receiving interference light of a first polarized component that has returned from the grating and a second polarized component reflected by the PBS, positional information of the wafer table is measured. Accordingly, because the first polarized component, which has passed through PBS passes through the wafer table until it is synthesized with the second polarized component again, does not proceed through the atmosphere outside, position measurement of the wafer table can be performed with high precision without the measurement beam being affected by the fluctuation of the atmosphere around the wafer table.

Claims

1. A movable body system, the system comprising:

a movable body that is movable in a predetermined plane, and has a holding member which holds an object, and a grating attached or formed on a surface of the movable body, in a plane substantially parallel to the predetermined plane and under the holding member; and

a measurement system that irradiates light from outside of the movable body onto the grating via inside the movable body and receives reflected light from the grating via the inside to measure positional information of the movable body in a measurement direction in the predetermined plane, the irradiated light moving on the grating according to the movement of the movable body,

wherein the measurement system irradiates the light onto the grating via a side surface of the movable body intersecting the predetermined plane.

2. The movable body system according to claim 1 wherein

the side surface of the movable body is made of an inclined surface which forms an acute angle or an obtuse angle with respect to the predetermined plane, and

the measurement system makes the light enter perpendicularly to the inclined surface.

3. The movable body system according to claim 1 wherein

the measurement system irradiates the light onto the grating via different side surfaces of the movable body.

4. The movable body system according to claim 3 wherein

the different side surfaces include two side surfaces of the movable body that extend in first and second directions orthogonal to each other in the predetermined plane, and the measurement system includes first and second measurement members which irradiate the light onto the grating via the two side surfaces, respectively.

5. The movable body system according to claim 3 wherein

the different side surfaces include a pair of side surfaces of the movable body which extend in a first direction in the predetermined plane, and the measurement system includes a pair of measurement members which irradiate the light onto the grating via the pair of side surfaces, respectively.

6. The movable body system according to claim 3 wherein

a plurality of lights that enter the inside of the movable body via different side surfaces are irradiated on substantially a same point in the predetermined plane.

7. The movable body system according to claim 1 wherein

the measurement system receives the reflected light from the grating through the side surface on which the irradiated light is incident.

8. The movable body system according to claim 1 wherein

the measurement system detects an interference light between the reflected light from the grating and light reflected by the side surface of the movable body.

9. The movable body system according to claim 1 wherein

the measurement system has a polarization separation member arranged external to the movable body that separates the light into first and second polarized components, and detects an interference light between the first polarized component reflected from the grating through the polarization separation member and the side surface and the second polarized component reflected by the polarization separation member.

10. The movable body system according to claim 1 wherein

the side surface of the movable body is an inclined surface which forms an acute angle with the surface where the grating is attached or formed, and

the measurement system irradiates the light onto the grating without reflecting the light inside the movable body.

11. The movable body system according to claim 1 wherein

the side surface of the movable body is an inclined surface which forms an obtuse angle with the surface where the grating is attached or formed, and

the measurement system irradiates the grating with the light which is reflected at least once inside the movable body.

12. The movable body system according to claim 1 wherein

the measurement system includes a plurality of measurement members which measure positional information of the movable body in the measurement direction, and a measurement of the positional information by a first one of the plurality of measurement members is switched to a measurement of the positional information by a second one of the plurality of measurement members.

13. The movable body system according to claim 1 wherein

the measurement system irradiates the light onto the grating without reflecting the light inside the movable body.

14. The movable body system according to claim 1 wherein

the measurement system makes the light obliquely enter the grating inside the movable body.

15. The movable body system according to claim 1 wherein

the measurement system irradiates the light onto the grating in the measurement direction.

16. The movable body system according to claim 1 wherein

the light that enters the inside of the movable body is irradiated on a predetermined point where the movable body is positioned in the predetermined plane or in the vicinity of the predetermined point.

17. The movable body system according to claim 1 wherein

the grating is arranged on a rear surface of the holding member in the plane, and the movable body includes a table having the holding member, where the light passes inside.

18. The movable body system according to claim 17 wherein

on one of the rear surface of the holding member and the grating, a reference point is arranged which serves as a reference for a position of the holding member in the plane.

19. The movable body system according to claim 17 wherein

the holding member is freely detachable to the table.

20. The movable body system according to claim 1 wherein

the movable body includes a transmission member on which the light is incident and the holding member is provided, the transmission member having a surface on which the grating is arranged, in the plane.

21. The movable body system according to claim 20 wherein

the transmission member has the surface covered with the holding member or a member different from the holding member.

22. A pattern formation apparatus, comprising:

a movable body system according to claim 1, in which for pattern formation to an object, the object is held by the movable body.

23. An exposure apparatus that exposes an object with a radiation pattern, comprising:

a patterning system that generates the radiation pattern on the object; and

the movable body system that includes a movable body and a measurement system, according to claim 1, wherein

the movable body includes a holding member which holds the object.

24. The exposure apparatus according to claim 23 wherein

the movable body includes a table having the holding member, through which light from the measurement system passes inside, and a grating is formed on the table or the holding member, and the measurement system irradiates the light onto the grating through the inside.

25. The exposure apparatus according to claim 23 wherein

the movable body includes a table through which light from the measurement system passes inside, and the holding member is arranged freely detachable to the table, the apparatus further comprising:

an alignment system that measures a positional relation between the holding member and the object held by the holding member, whereby

the movable body is moved to expose the object with the radiation pattern based on the measured positional relation and positional information of the movable body measured by the measurement system which irradiates the light onto a grating of the movable body through the inside.

26. The exposure apparatus according to claim 23 wherein

the patterning system irradiates an energy beam onto the object via a pattern for the exposure, and the measurement system irradiates light onto a grating of the movable body via inside the movable body, and an irradiation point of the light is defined in an irradiation area of the energy beam.

27. The exposure apparatus according to claim 23 wherein

the measurement system irradiates light onto a grating of the movable body via inside the movable body, and an irradiation point of the light is an exposure center of the patterning system.

28. A device manufacturing method, the method comprising:

exposing a substrate using the exposure apparatus according to claim 23; and

developing the exposed substrate.

29. A movable body system, the system comprising:

a movable body that is movable in a predetermined plane, and has a holding member which holds an object, and a grating attached or formed on a surface of the movable body, in a plane substantially parallel to the predetermined plane and under the holding member; and

a measurement system that irradiates light from outside of the movable body onto the grating via inside the movable body and receives reflected light from the grating via the inside to measure positional information of the movable body in a measurement direction in the predetermined plane, the irradiated light moving on the grating according to the movement of the movable body, wherein

the measurement system irradiates the grating with the light which is reflected at least once inside the movable body.

30. The movable body system according to claim 29 wherein

the measurement system makes the light enter from the lower surface side of the movable body.

31. The movable body system according to claim 30 wherein

the measurement system includes an optical system which is arranged below the movable body and of which an optical axis is substantially orthogonal to the predetermined plane.

32. The movable body system according to claim 30 wherein

the measurement system irradiates the light onto different measurement points in the plane.

33. The movable body system according to claim 29 wherein

the measurement system irradiates the light onto the grating via an upper surface of the movable body substantially parallel to the predetermined plane.

34. An exposure apparatus that exposes an object with a radiation pattern, comprising;

a patterning system that generates the radiation pattern on the object; and

a movable body system that includes the movable body and a measurement system, according to claim 29 wherein

the movable body includes a holding member which holds the object.

35. The exposure apparatus according to claim 34 wherein

the movable body includes a table having the holding member, through which light from the measurement system passes inside, and a grating is formed on the table or the holding member, and the measurement system irradiates the light onto the grating through the inside.

36. The exposure apparatus according to claim 34 wherein

the movable body includes a table through which light from the measurement system passes inside, and the holding member is arranged freely detachable to the table, the apparatus further comprising:

an alignment system that measures a positional relation between the holding member and the object held by the holding member, whereby

the movable body is moved to expose the object with the radiation pattern based on the measured positional relation and positional information of the movable body measured by the measurement system which irradiates the light onto a grating of the movable body through the inside.

37. The exposure apparatus according to claim 34 wherein

the patterning system irradiates an energy beam onto the object via a pattern for the exposure, and the measurement system irradiates light onto a grating of the movable body via inside the movable body, and an irradiation point of the light is defined in an irradiation area of the energy beam.

38. The exposure apparatus according to claim 34 wherein

the measurement system irradiates light onto a grating of the movable body via inside the movable body, and an irradiation point of the light is an exposure center of the patterning system.

39. A device manufacturing method, the method comprising:

exposing a substrate using the exposure apparatus according to claim 34; and

developing the exposed substrate.

40. An exposure method comprising:

moving a movable body, in a predetermined plane, which has a holding member and a grating attached or formed on a surface of the movable body, in a plane substantially parallel to the predetermined plane and under the holding member to expose an object held by the holding member; and

measuring positional information of the movable body in a measurement direction in the predetermined plane by irradiating light from outside of the movable body onto the grating via inside the movable body and receiving reflected light from the grating via the inside, the irradiated light moving on the grating according to the movement of the movable body,

wherein the light is irradiated onto the grating via a side surface of the movable body which intersects the predetermined plane.

41. The exposure method according to claim 40 wherein

the side surface of the movable body is made of an inclined surface which forms an acute angle or an obtuse angle with respect to the predetermined plane, and

the light is made to enter perpendicularly with respect to the inclined surface.

42. The exposure method according to claim 40 wherein

the light is irradiated onto the grating via different side surfaces of the movable body.

43. The exposure method according to claim 42 wherein

the different side surfaces include two side surfaces of the movable body that extend in first and second directions orthogonal to each other in the predetermined plane, and first and second measurement members irradiate the light onto the grating via the two side surfaces, respectively.

44. The exposure method according to claim 42 wherein

the different side surfaces include a pair of side surfaces of the movable body which extend in a first direction in the predetermined plane, and

a pair of measurement members irradiate the light onto the grating via the pair of side surfaces, respectively.

45. The exposure method according to claim 40 wherein

an energy beam is irradiated onto the object via a pattern for the exposure, and a measurement point onto which the light is irradiated is defined in an irradiation area of the energy beam.

46. The exposure method according to claim 40 wherein

a measurement point onto which the light is irradiated is an exposure center.

47. A device manufacturing method, the method comprising:

exposing a substrate using the exposure method according to claim 40; and

developing the exposed substrate.

48. The exposure method according to claim 40 wherein

the first light and the second light are irradiated onto the grating via an upper surface of the movable body substantially parallel to the predetermined plane.

49. The exposure method according to claim 40 wherein

the positional information of the movable body is measured using first and second measurement members each irradiating the light onto the grating via inside the movable body, and a measurement of the positional information using one of the first and second measurement members is switched to a measurement of the positional information using the other of the first and second measurement members.

50. The exposure method according to claim 40 wherein

the light is irradiated onto the grating without reflecting the light inside the movable body.

51. The exposure method according to claim 40 wherein

the light reflected at least once inside the movable body is irradiated onto the grating.

52. The exposure method according to claim 40 wherein

the light proceeds toward the grating inside the movable body along a path intersecting the surface where the grating is attached or formed.

53. An exposure method of exposing an object with a radiation pattern, comprising:

measuring positional information of a movable body, in a measurement direction in a predetermined plane, having a grating attached or formed on a surface of the movable body, in a plane substantially parallel to the predetermined plane, using first and second measurement members which irradiate first light and second light from outside of the movable body onto the grating via inside the movable body and receives reflected light from the grating via the inside; and

switching a measurement of positional information of the movable body using one of the first and second measurement members to a measurement of positional information of the movable body using the other of the first and second measurement members,

wherein the first and second light are made to enter the inside of the movable body in opposite ways to each other substantially along a same direction in the predetermined plane.

54. The exposure method according to claim 53 wherein

the first light is made to enter from one of a pair of side surfaces of the movable body each extending in a first direction in the predetermined plane and the second light is made to enter from the other of the pair of side surfaces.

55. The exposure method according to claim 53 wherein

an energy beam is irradiated onto the object via a pattern for the exposure, and measurement points onto which the first light and the second light are irradiated are defined in an irradiation area of the energy beam.

56. The exposure method according to claim 53 wherein

measurement points onto which the first light and the second light are irradiated are an exposure center.

57. A device manufacturing method, the method comprising:

exposing a substrate using the exposure method according to claim 53; and

developing the exposed substrate.

58. The exposure method according to claim 53 wherein

the first light and the second light are irradiated onto the grating from a lower surface side of the movable body.

59. The exposure method according to claim 53 wherein

the first light and the second light are irradiated onto the grating without reflecting the first light and the second light inside the movable body.

60. The exposure method according to claim 53 wherein

the first light and the second light reflected at least once inside the movable body are irradiated onto the grating.

61. The exposure method according to claim 53 wherein

the first light and the second light proceed toward the grating inside the movable body along paths intersecting the attached or formed surface of the grating.

62. The exposure method according to claim 53 wherein

the first light and the second light are irradiated onto the grating from a lower surface side of the movable body.