Display apparatus and methods for manufacture thereof
First Claim
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1. A microelectromechanical device comprising:
- a first component defining a plane; and
a beam including at least one amorphous silicon layer suspended over the first component, wherein a dimension of the beam normal to the defined plane is at least 1.4 times at least one dimension of the beam in a plane parallel to the defined plane, wherein the beam comprises at least one additional layer composed of a material other than amorphous silicon.
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Abstract
Display devices incorporating shutter-based light modulators are disclosed along with methods of manufacturing such devices. The methods are compatible with thin-film manufacturing processes known in the art and result in displays having lower power-consumption.
119 Citations
18 Claims
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1. A microelectromechanical device comprising:
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a first component defining a plane; and a beam including at least one amorphous silicon layer suspended over the first component, wherein a dimension of the beam normal to the defined plane is at least 1.4 times at least one dimension of the beam in a plane parallel to the defined plane, wherein the beam comprises at least one additional layer composed of a material other than amorphous silicon. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification