Processing information management system in a plasma processing tool

• US 8,000,827 B2
• Filed: 02/23/2010
• Issued: 08/16/2011
• Est. Priority Date: 02/18/2005
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Jensen, John, Seto, Jacqueline, Huang, Chung-Ho, Weetman, Chad R.
• Primary Examiner(s): Masinick; Michael D
• Application Number:
  US12/711,163
• Publication Number:
  US 20100152879A1
• Time in Patent Office: 539 Days
• Field of Search: 700/95, 700/96, 700108-110, 700/121
• US Class Current: 700/110
• CPC Class Codes: G05B 19/4183 characterised by data acquisition, e.g. workpiece identification
• CPC Class Codes: G05B 2219/31304 Identification of workpiece and data for control, inspection, safety, calibration
• CPC Class Codes: G05B 2219/35391 Sort, order entered data hierarchical
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A plasma-processing tool for processing a substrate using at least a first process recipe and a second process recipe is provided. The plasma-processing tool includes transducers configured to collect process data streams, each process data stream pertaining to a process parameter being monitored during recipe execution. The tool also includes a logic circuitry configured for receiving a set of meta-data wherein each meta-data includes identification data about the substrate and the process recipe being executed. The logic circuitry is also configured for receiving a set of process data streams, each of which being associated with a specific process recipe. The logic circuitry further includes storing the meta-data and the process data streams associated with the first process recipe as a first file and the meta-data and the process data streams associated with the second process recipe as a second file.

Claims

1. An article of manufacture comprising a non-transitory program storage medium having computer readable code embodied therein, said computer readable code being configured for managing substrate processing data in a substrate processing environment, said substrate processing data being acquired while a substrate is processed in a plasma-processing chamber of a cluster tool, comprising:

computer readable code for receiving meta-data associated with said substrate, said meta-data identifying a process recipe employed to process said substrate;

computer readable code for receiving from a plurality of transducers a plurality of process data streams, each of said plurality of process data streams pertaining to a process parameter being monitored;

computer readable code for storing individual data items associated with said plurality of process data streams and said meta-data in a first file;

computer readable code for writing said first file to a process control computer as a written file;

computer readable code for pushing said written file as a pushed file via a first path to an application; and

computer readable code for notifying said application via a second path that said pushed file is available.

2. The article of manufacture of claim 1 further comprising computer readable code for providing said individual data items pertaining to said plurality of process data streams substantially in real time to a real-time process control computer, said real-time process control computer being configured to analyze said individual data items while said substrate is processed to monitor for process irregularities.

3. The article of manufacture of claim 1 further comprising computer readable code for storing said first file into an archive database, wherein said first file stores data pertaining to only said process recipe and said substrate, but not pertaining to other process recipes or other substrates.

4. The article of manufacture of claim 3 further comprising computer readable code for updating indexes in said archive database with said individual data items, wherein said archive database represents a relational database.

5. The article of manufacture of claim 3 further comprising computer readable code for indexing said first file in said archive database to improve searching speed in subsequent searches.

6. The article of manufacture of claim 3 wherein said computer readable code for storing said first file into said archive database further comprises computer readable code for placing said first file into a processing data hierarchy, said processing data hierarchy comprising files stored as leaf nodes in a tree-like storage arrangement, wherein said files at a parent level are grouped by dates, said files at a grand-parent level are grouped by file types, said files at a grand-grand parent level are grouped by module IDs, and said files at a grand-grand-grand parent level are grouped by tool IDs.

7. The article of manufacture of claim 6 wherein said tree-like storage arrangement is navigable on a display screen by a user employing a navigation interface, said navigation interface permitting said user to view said tree-like storage arrangement and to select any of said leaf nodes for viewing.

8. The article of manufacture of claim 1 further comprising:

computer readable code for receiving a registration from said application, said registration identifying a file type needed by said application; and

computer readable code for receiving a notification indicating that said first file in accordance with said file type has been created.

9. The article of manufacture of claim 1 further comprising computer readable code for furnishing said substrate processing data to a customer application, said furnishing further including translating said first file into a format suitable for use by said customer application.

10. The article of manufacture of claim 1 further comprising computer readable code for creating a second file for storing a maintenance log when processing said substrate has been completed.

11. A plasma-processing tool for processing at least a substrate using at least a first process recipe and a second process recipe, the plasma processing tool comprising:

a plurality of transducers configured to collect a plurality of process data streams, each of said plurality of process data streams pertaining to a process parameter being monitored when said substrate is being processed using at least one of said first process recipe and said second process recipe; and

a logic circuitry configured for

receiving a first meta-data and a second meta-data, said first meta-data including first identification data about said substrate and said first process recipe, said second meta-data including second identification data about said substrate and said second process recipe,

receiving a first set of process data streams and a second set of process data streams, said first set of process data streams being associated with said first process recipe, said second set of process data streams being associated with said second process recipe,

storing said first set of process data streams and said first meta-data as a first file and storing said second set of process data streams and said second meta-data as a second file,

writing said first file to a process control computer as a written file,

pushing said written file as a pushed file via a first path to an application, and notifying said application via a second path that said pushed file is available.

12. The plasma-processing tool of claim 11 wherein said logic circuitry is further configured for storing individual data items associated with said first set of process data streams in a first table and storing individual data items associated with said second set of process data streams in a second table, and wherein said logic circuitry is further configured for updating indexes in a database with at least said individual data items with said first set of process data streams.

13. The plasma-processing tool of claim 11 wherein said logic circuitry is further configured for receiving a registration from said application, said registration identifying a file type needed by said application, and wherein said logic circuitry is further configured for receiving a notification indicating that said first file in accordance with said file type has been created.

14. The plasma-processing tool of claim 11 wherein said logic circuitry is further configured for creating a third file for storing a maintenance log when processing said substrate has been completed, wherein said substrate is being processed using at least one of said first process recipe and said second process recipe.

15. The plasma-processing tool of claim 11 wherein at least one of said first file and second file is organized into a processing data hierarchy, said processing data hierarchy comprising files stored as leaf nodes in a tree-like storage arrangement, wherein said files at a parent level are grouped by dates, said files at a grand-parent level are grouped by file types, said files at a grand-grand parent level are grouped by module IDs, and said files at a grand-grand-grand parent level are grouped by tool IDs.

16. A plasma processing information management system for managing substrate processing data acquired when a substrate is processed in a plasma-processing system, said plasma processing information management system comprising:

a module for collecting said substrate processing data, said substrate processing data including at least meta-data and a plurality of process data streams, wherein said meta-data representing identification data about said substrate and a process recipe, wherein said plurality of process data streams is associated with process parameters being monitored by a plurality of transducers while said substrate is being processed, wherein said meta-data and said plurality of process data streams are stored in a first file;

an equipment information management system (EIMS) configured for performing at least one of managing individual data items of said plurality of process data streams and managing communications related to said individual data items to a third party, said EIMS being further configured for receiving a registration from an application, said registration identifying a file type needed by said application, said EIMS being further configured for receiving a notification indicating that said first file in accordance with said file type has been created;

a process control computer configured for receiving said first file as a written file, said process computer being further configured for performing analysis of said first file, wherein said analysis is performed in real-time while said substrate is being processed to identify process irregularities; and

a database for storing said first file,

wherein said EIMS is further configured for pushing said written file as a pushed file via a first path to said application, and

wherein said EIMS is further configured for notifying said application via a second path that said pushed file is available.

17. The plasma processing information management system of claim 16 wherein said module for collecting said substrate processing data is configured to collect said individual data items in each of said plurality of process data streams in accordance with one of a first methodology and a second methodology, said first methodology representing data collection that is periodic in time, said second methodology representing data collection that takes place when predefined events occur.

18. The plasma processing information management system of claim 17 wherein said module for collecting said substrate processing data is configured to store said individual data items associated with said plurality of process data streams in a table.

19. The plasma processing information management system of claim 16 wherein said database include a processing data hierarchy, said processing data hierarchy comprising files stored as leaf nodes in a tree-like storage arrangement, wherein said files at a parent level are grouped by dates, said files at a grand-parent level are grouped by file types, said files at a grand-grand parent level are grouped by module IDs, and said files at a grand-grand-grand parent level are grouped by tool IDs.

20. The plasma processing information management system of claim 19 wherein said tree-like storage arrangement is navigable on a display screen by a user employing a navigation interface, said navigation interface permitting said user to view said tree-like storage arrangement and to select any of said leaf nodes for viewing.