Microfabricated elastomeric valve and pump systems
First Claim
1. A method of microfabricating an elastomeric structure, comprising:
- microfabricating a first elastomeric layer, wherein the first elastomeric layer has a first Young'"'"'s modulus between 20 Pa and 1 GPa;
micro fabricating a second elastomeric layer wherein the second elastomeric layer has a second Young'"'"'s modulus between 20 Pa and 1 GPa;
positioning the second elastomeric layer on top of the first elastomeric layer such that at least one recess in the second layer perpendicularly passes over and is completely separated by a membrane from at least one recess in the first layer; and
bonding a bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer.
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Accused Products
Abstract
A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
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Citations
26 Claims
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1. A method of microfabricating an elastomeric structure, comprising:
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microfabricating a first elastomeric layer, wherein the first elastomeric layer has a first Young'"'"'s modulus between 20 Pa and 1 GPa; micro fabricating a second elastomeric layer wherein the second elastomeric layer has a second Young'"'"'s modulus between 20 Pa and 1 GPa; positioning the second elastomeric layer on top of the first elastomeric layer such that at least one recess in the second layer perpendicularly passes over and is completely separated by a membrane from at least one recess in the first layer; and bonding a bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method of microfabricating an elastomeric structure, comprising:
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forming a first elastomeric layer, having a first Young'"'"'s Modulus between 20 Pa and 1 GPa, on a substrate; curing the first elastomeric layer; patterning a first sacrificial layer over the first elastomeric layer; forming a second elastomeric layer, having a second Young'"'"'s Modulus between 20 Pa and 1 GPa, over the first elastomeric layer, thereby encapsulating the first patterned sacrificial layer between the first and second elastomeric layers; curing the second elastomeric layer; removing the first patterned sacrificial layer selective to the first elastomeric layer and the second elastomeric layer, thereby forming at least one first recess between the first and second layers of elastomer; and patterning a second sacrificial layer over the substrate prior to forming the first elastomeric layer, such that the second patterned sacrificial layer is removed during removal of the first patterned sacrificial layer to form at least one recess along a bottom of the first elastomeric layer, wherein the at least one recess along the bottom of the first elastomeric layer is completely separated by a membrane from the at least one first recess between the first and second layers of the elastomer. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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Specification