Microfabricated devices and method for fabricating microfabricated devices
First Claim
1. A microfabricated device for operation in a fluid, comprising:
- a substrate having a first and second surface;
a first electrode material layer located over the first surface of the substrate;
a piezoelectric material layer located over the first electrode material layer;
a second electrode material layer located over the piezoelectric material layer; and
a layer of isolation material located over the second electrode material layer that at least one of chemically or electrically isolates a portion of the second electrode material layer from a fluid.
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Accused Products
Abstract
Microfabricated devices for operation in a fluid that include a substrate that has a first and second surface and a first electrode material layer located over the first surface of the substrate. The devices have a piezoelectric material layer located over the first electrode material layer and a second electrode material layer located over the piezoelectric material layer. The devices also include a layer of isolation material located over the second electrode material layer that at least one of chemically or electrically isolates a portion of the second electrode material layer from a fluid. Some devices include a layer of conductive material located over the layer of isolation material.
66 Citations
19 Claims
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1. A microfabricated device for operation in a fluid, comprising:
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a substrate having a first and second surface; a first electrode material layer located over the first surface of the substrate; a piezoelectric material layer located over the first electrode material layer; a second electrode material layer located over the piezoelectric material layer; and a layer of isolation material located over the second electrode material layer that at least one of chemically or electrically isolates a portion of the second electrode material layer from a fluid. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A microfabricated device for operation in a fluid, comprising:
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a substrate having a first and second surface; a first electrode material layer located over the first surface of the substrate; a piezoelectric material layer located over the first electrode material layer; a second electrode material layer located over the piezoelectric material layer; and a layer of isolation material located over the second electrode material layer that at least one of chemically or electrically isolates a portion of the second electrode material layer from a fluid, wherein the first or second electrode material layer comprises a pair of sensing electrodes and a pair of actuation electrodes.
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Specification