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MEMS ultrasonic device having a PZT and cMUT

  • US 8,004,373 B2
  • Filed: 10/06/2009
  • Issued: 08/23/2011
  • Est. Priority Date: 08/03/2005
  • Status: Active Grant
First Claim
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1. A MEMS ultrasonic device comprising:

  • a PZT transducer; and

    a cMUT structure bonded to the PZT transducer.

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