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Thin film transistor, method of manufacturing the same, and flat panel display device having the same

  • US 8,008,658 B2
  • Filed: 02/04/2009
  • Issued: 08/30/2011
  • Est. Priority Date: 02/05/2008
  • Status: Active Grant
First Claim
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1. A thin film transistor (TFT), comprising:

  • a substrate;

    a gate electrode formed on the substrate;

    an oxide semiconductor layer electrically insulated from the gate electrode by a gate insulating layer including a channel region, a source region, and a drain region;

    a source electrode and a drain electrode contacting the source region and the drain region; and

    the oxide semiconductor layer being formed of an IZO layer (indium zinc oxide layer) layer comprising Zr,where in a carrier density of the IZO layer is controlled to 1×

    1013 to 1×

    1018 (a number of carriers)*cm

    3
    by controlling an amount of Zr.

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