Optimal rasterization for maskless lithography

• US 8,009,269 B2
• Filed: 03/14/2007
• Issued: 08/30/2011
• Est. Priority Date: 03/14/2007
• Status: Expired due to Fees

• Current Assignee: ASML Holding NV, ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Holding NV, ASML Netherlands BV (ASML Holding NV)
• Inventors: Zimmerman, Richard Carl, Westeinde, Ronnie Florentius Van T, Hintersteiner, Jason Douglas, Chilov, Kamen Hristov, Cuperus, Minne, Troost, Kars Zeger
• Primary Examiner(s): Glick; Edward J
• Assistant Examiner(s): Asfaw; Mesfin T
• Application Number:
  US11/686,136
• Publication Number:
  US 20080224251A1
• Time in Patent Office: 1,630 Days
• Field of Search: 355/53
• US Class Current: 355/53
• CPC Class Codes: G03F 7/70291 Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
• CPC Class Codes: G03F 7/70358 Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
• CPC Class Codes: G03F 7/70475 Stitching, i.e. connecting image fields to produce a device field, the field occupied by a device such as a memory chip, processor chip, CCD, flat panel display
• CPC Class Codes: G03F 7/70508 Data handling in all parts of the microlithographic apparatus, e.g. handling pattern data for addressable masks or data transfer to or from different components within the exposure apparatus
• CPC Class Codes: G03F 7/70791 Large workpieces, e.g. glass substrates for flat panel displays or solar panels

Abstract

A lithographic system is provided in which an extent of overlap between pattern sections is adjusted in order to match a size of a pattern section to a size of a repeating portion of the pattern to be formed.

Claims

1. A lithographic apparatus comprising:

a device configured to emit a modulated beam of radiation;

a projection system configured to project the modulated beam of radiation onto a substrate; and

a controller configured to control exposing a pattern of radiation on the substrate, wherein the pattern comprises first and second pattern portions corresponding to first and second features to be patterned on the substrate, wherein each of the first and second pattern portions include first and second pattern sections, and

wherein the controller is configured to control a width or height of an overlap of the first and second pattern sections, such that a first position in the first portion of the first pattern section forming the first feature substantially corresponds to a first position in the second portion of the first pattern section forming the second feature.

2. The apparatus according to claim 1, wherein:

the first and second pattern portions each further comprise a third pattern section; and

the controller is configured to control an extent of the overlap of the first, second, and third pattern sections in a first direction, such that the extent of the overlap in the first direction is the same for the first, second, and third pattern sections.

3. The apparatus according to claim 1, wherein:

the first and second pattern portions each further comprise a third pattern section; and

the controller is configured to control an extent of the overlap of the first, second, and third pattern sections in a first direction, such that the extent of the overlap in the first direction is different for at least one pair of adjoining first, second, and third pattern sections from that of at least one other pair of adjoining first, second, and third pattern sections.

4. The apparatus according to claim 1, wherein:

the controller is configured to expose the first and second pattern portions on the substrate by using the first and second pattern portions to expose a first row including the first and second pattern sections and using the first and second pattern portions to expose a second row including third and fourth pattern sections, the third and fourth pattern sections being similar to the first and second pattern sections in the first row, and

the first and second rows are parallel to a first direction.

5. The apparatus according to claim 4, further comprising:

an actuator system configured to move the substrate relative to the projection system in a direction parallel to the first direction, while the first and second rows are exposed on the substrate;

wherein the controller is configured to control an extent of the overlap of the first and second pattern sections and the third and fourth pattern sections by adjusting at least one of a relative speed of the substrate and projection system and a timing of exposure of one or more of the first, second, third, or fourth pattern sections.

6. The apparatus according to claim 4, wherein

the controller is configured to control an extent of an overlap of the first and second rows in a second direction, perpendicular to the first direction, such that a part of the first and second pattern portions are exposed by a part of the modulated beam of radiation.

7. The apparatus according to claim 6, wherein:

the controller is configured to expose the first and second pattern portions by using the first and second pattern portions to expose a third row including fifth and sixth pattern sections, the fifth and sixth pattern sections being similar to the first and second pattern sections in the first row; and

the controller is configured to control an extent of an overlap of the first, second, and third rows in the second direction, such that the extent of the overlap in the second direction is the same for first, second, and third rows.

8. The apparatus according to claim 6, wherein:

the controller is configured to expose the first and second pattern portions by using the first and second pattern portion to expose a third row including fifth and sixth pattern sections, the fifth and sixth pattern sections being similar to the first and second pattern sections in the first row; and

the controller is configured to control the extent of the overlap of the first, second, and third rows in the second direction, such that the extent of the overlap in the second direction is different for at least one pair of adjoining first, second, and third rows from that of at least one other pair of adjoining first, second and third rows.

9. The apparatus according to claim 4, wherein the controller is configured to control a width of the first or second row in a second direction, perpendicular to the first direction, such that a part of the first and second pattern portions is exposed by a part of the modulated beam of radiation modulated by a same part of the device.

10. The apparatus according to claim 9, wherein the controller is configured to control the width, in the second direction, of the first or second row, such that the width in the second direction is substantially equal for the first and second rows.

11. The apparatus according to claim 9, wherein the controller is configured to control the width, in the second direction, of the first or second row, such that the width in the second direction is different for the first and second rows.

12. The apparatus according to claim 9, wherein the controller is configured to control the width of the first or second row in the second direction by setting at least a part of the device, such that radiation is not exposed on the substrate by a corresponding portion of the modulated beam of radiation.

13. The apparatus according to claim 9, further comprising:

a movable barrier configured to prevent a controlled proportion of the cross-section of the modulated beam of radiation from being projected onto the substrate or a controlled proportion of the cross-section of the device from being illuminated by the beam of radiation;

wherein the controller is configured to control the width of the first or second row in the second direction by controlling a position of the movable barrier.

14. The apparatus according to claim 1, wherein:

the pattern further comprises third and fourth pattern portions corresponding to third and fourth features to be patterned on the substrate, wherein each of the third and fourth pattern portions include first and second pattern sections; and

the controller is configured to control a width or height of an overlap, in a first direction, of the first and second pattern sections of the third and fourth pattern portions independently of the control of the width or height of the overlap of the first and second pattern sections of the first and second pattern portions, such that a first position in the third pattern portion of the first pattern section forming the third feature substantially corresponds to a first position in the fourth pattern portion of the first pattern section forming the fourth feature.

15. The apparatus according to claim 1, wherein the first and second pattern portions correspond to a portion of the substrate on which a discrete device is to be formed.

16. The apparatus according to claim 1, further comprising:

a data processor configured to convert pattern data, corresponding to the first and second pattern portions, into corresponding control signals for the device; and

a memory configured to store the control signals,

wherein the stored control signals are provided to the device in order to expose the first and second pattern portions in a plurality of regions on the substrate.

17. The apparatus according to claim 16, wherein the first and second pattern portions are repeated and separated by non-repeating pattern portions.

18. The apparatus according to claim 17, further comprising:

a second data processor configured to convert pattern data, corresponding to the non-repeating pattern portions, into corresponding control signals for the device.

19. A method, comprising:

modulating a beam of radiation;

projecting first and second pattern sections formed in the modulated beam of radiation onto the substrate to form first and second pattern portions that correspond to first and second features on the substrate; and

controlling a width or height of an overlap of the first and second pattern sections, such that a first position in the first portion of the first pattern section forming the first feature substantially corresponds to a first position in the second portion of the first pattern section forming the second feature.

20. The method of claim 19, wherein

the controlling the width or height of the overlap comprises exposing a first row including first and second pattern sections and exposing a second row including third and fourth pattern sections using the first and second pattern portions the third and fourth pattern sections being similar to the first and second pattern sections in the first row;

the first and second rows are parallel to a first direction.

21. The method of claim 20, further comprising:

moving the substrate, with an actuator system, relative to a projection system in a direction parallel to the first direction, while the first, second, third, and fourth pattern sections are exposed on the substrate; and

wherein controlling the width or height of the overlap of the first, second, third, and fourth pattern sections comprises adjusting at least one of a relative speed of the substrate and projection system and a timing of exposure of the first, second, third, or fourth pattern sections.