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Advanced process sensing and control using near infrared spectral reflectometry

  • US 8,009,938 B2
  • Filed: 02/29/2008
  • Issued: 08/30/2011
  • Est. Priority Date: 02/29/2008
  • Status: Active Grant
First Claim
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1. A processing chamber comprising:

  • a chamber body assembly having a processing volume;

    a showerhead assembly coupled to a ceiling of the chamber body and having a region transmissive to an optical metrology signal;

    an optical monitoring device arranged to view the processing volume at a radial position of the chamber body; and

    a spectral sensing system comprising a fiber optic bundle arranged to view the processing volume of the chamber body through the transmissive region of the showerhead assembly at an angle orthogonal to the plane of the showerhead, wherein the fiber optic bundle further comprises;

    a first active portion comprising a plurality of first source fibers and a plurality of first signal fibers;

    a second active portion comprising a plurality of second source fibers and a plurality of second signal fibers; and

    a third inactive portion comprising a plurality of inactive fibers.

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