Process monitoring apparatus and method for monitoring process
First Claim
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1. A process monitoring apparatus for monitoring a semiconductor manufacturing process, comprising:
- a container element having a housing unit;
a monitor element including a wafer and a plurality of sensors attached to the wafer, the monitor element being able to be transferred into target environments in a process facility or into the container element by a transfer robot; and
an electronics module attached to the container element, the electronics module being available for communication with the monitor element when the monitor element is transferred into the container element, unloaded from the transfer robot and stored in the housing unit, wherein the housing unit is a dedicated storage chamber for the monitor element and the electronics module is placed in the dedicated storage chamber.
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Abstract
A sensor on a semiconductor wafer is used as a process monitor and a capacitor is employed as a power supply for the sensor. The capacitor can be formed by stacking a poly-silicon layer and a silicon nitride layer on the wafer. A timer can be used to specify an operation time or an operation timing, etc. Furthermore, unauthorized use is prevented by storing a keyword in an ROM of the process monitor.
20 Citations
8 Claims
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1. A process monitoring apparatus for monitoring a semiconductor manufacturing process, comprising:
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a container element having a housing unit; a monitor element including a wafer and a plurality of sensors attached to the wafer, the monitor element being able to be transferred into target environments in a process facility or into the container element by a transfer robot; and an electronics module attached to the container element, the electronics module being available for communication with the monitor element when the monitor element is transferred into the container element, unloaded from the transfer robot and stored in the housing unit, wherein the housing unit is a dedicated storage chamber for the monitor element and the electronics module is placed in the dedicated storage chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification