Multistage proof-mass movement deceleration within MEMS structures
First Claim
1. A micro-electromechanical systems (MEMS) device comprising:
- a substrate comprising at least one anchor;
a proof mass comprising first and second deceleration extensions extending from said proof mass;
a motor drive comb;
a motor sense comb;
a plurality of suspensions configured to suspend said proof mass over said substrate and between said motor drive comb and said motor sense comb, said suspensions anchored to said substrate;
a body attached to said substrate; and
at least one first deceleration beam extending from a first side of said body, said at least one first deceleration beam configured to engage at least one of said first and second deceleration extensions and slow or stop said proof mass before said proof mass contacts said motor drive comb and said motor sense comb; and
at least one second deceleration beam extending from a second side of said body, said at least one second deceleration beam configured to engage at least one deceleration extension extending from at least one crossbeam and slow or stop said proof mass before said proof mass contacts said motor drive comb and said motor sense comb.
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Accused Products
Abstract
A micro-electromechanical systems (MEMS) device includes a substrate comprising at least one anchor, a proof mass having first and second deceleration extensions extending therefrom, a motor drive comb, a motor sense comb, a plurality of suspensions configured to suspend the proof mass over the substrate and between the motor drive comb and the motor sense comb. The suspensions are anchored to the substrate. A body is attached to the substrate. At least one deceleration beam extends from a first side of said body. The at least one deceleration beam is configured to engage at least one of the first and second deceleration extensions and slow or stop the proof mass before the proof mass contacts the motor drive comb and the motor sense comb.
44 Citations
20 Claims
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1. A micro-electromechanical systems (MEMS) device comprising:
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a substrate comprising at least one anchor; a proof mass comprising first and second deceleration extensions extending from said proof mass; a motor drive comb; a motor sense comb; a plurality of suspensions configured to suspend said proof mass over said substrate and between said motor drive comb and said motor sense comb, said suspensions anchored to said substrate; a body attached to said substrate; and at least one first deceleration beam extending from a first side of said body, said at least one first deceleration beam configured to engage at least one of said first and second deceleration extensions and slow or stop said proof mass before said proof mass contacts said motor drive comb and said motor sense comb; and at least one second deceleration beam extending from a second side of said body, said at least one second deceleration beam configured to engage at least one deceleration extension extending from at least one crossbeam and slow or stop said proof mass before said proof mass contacts said motor drive comb and said motor sense comb. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A deceleration stop for a micro-electromechanical systems (MEMS) device, the MEMS device comprising a substrate and at least one proof mass, said deceleration stop comprising:
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a body; at least one deceleration extension extending from said at least one proof mass; first and second deceleration beams extending from said body toward said at least one proof mass, disposed on a first side of the deceleration extension and configured to slow or stop motion of said at least one proof mass in a first direction; third and fourth deceleration beams extending from said body toward said at least one proof mass, disposed on a second side of the deceleration extension and configured to slow or stop motion of said at least one proof mass in a second direction, said deceleration extension configured to engage at least one of said deceleration beams and cause said at least one proof mass to slow or stop before contacting components of the MEMS device adjacent to said at least one proof mass; and a fifth deceleration beam extending from said body toward a crossbeam said fifth deceleration beam configured to engage at least one deceleration extension extending from at least one crossbeam and slow or stop said proof mass before said proof mass contacts said motor drive comb and said motor sense comb. - View Dependent Claims (16, 17, 18, 19)
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20. A gyroscope, comprising:
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a substrate; at least one crossbeam anchored to said substrate; at least one proof mass, said at least one proof mass comprising first and second deceleration extensions; a plurality of suspensions connected to a respective one of said at least one crossbeam and configured to suspend said at least one proof mass above said substrate; motor drive combs adjacent said at least one proof mass; motor sense combs adjacent said at least one proof mass; at least one body attached to said at least one crossbeam; first and second deceleration beams extending from said at least one body toward said at least one proof mass, the first and second deceleration beams disposed on a first side of the first and second deceleration extensions and configured to slow or stop motion of said at least one proof mass in a first direction; third and fourth deceleration beams extending from said at least one body toward said at least one proof mass, the third and fourth deceleration beams disposed on a second side of the first and second deceleration extensions and configured to slow or stop motion of said at least one proof mass in a second direction, said first and second deceleration extensions configured to engage at least one of said first, second, third, or fourth deceleration beams and cause said at least one proof mass to slow or stop before contacting said motor drive combs and said motor sense combs; and at least one fifth deceleration beam extending from a second side of said body toward said crossbeam, said at least one fifth deceleration beam configured to engage at least one deceleration extension extending from said at least one crossbeam and slow or stop said proof mass before said proof mass contacts said motor drive comb and said motor sense comb.
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Specification