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Diamond like carbon coating of substrate housings

  • US 8,012,586 B2
  • Filed: 06/14/2007
  • Issued: 09/06/2011
  • Est. Priority Date: 11/22/2006
  • Status: Active Grant
First Claim
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1. An article comprising:

  • a thermoplastic and an adherent diamond like carbon coating on one or more surfaces of said thermoplastic, said adherent diamond like carbon coating has a gas permeation coefficient for helium of 0.59 Barrers or less, the diamond like carbon coating has a surface resistivity of from about 107 to about 1014 ohm/square and said adherent diamond like carbon coating has a transmittance that is 0% to 70% less than the transmittance of said thermoplastic to light in the range of 300 nm to 1100 nm, wherein the article is a carrier for a substrate used in semiconductor manufacturing.

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