Semiconductor device and manufacturing method thereof
First Claim
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1. A manufacturing method of a semiconductor device, comprising the steps of:
- forming trenches at plural element isolation regions of a semiconductor substrate respectively, and filling inside of the respective trenches with insulators;
defining active regions on the semiconductor substrate by forming a first element isolation structure in a first trench and a second element isolation structure in a second trench respectively by removing a part of the insulator only from inside of the second trench;
simultaneously forming a first impurity region at least at a lower portion of the first element isolation structure and a second impurity region at a first portion aligned to and under the second element isolation structure and deeper than the first impurity region by doping a first impurity into a portion including the first element isolation structure and the second element isolation structure of the semiconductor substrate; and
simultaneously forming a third impurity region at a surface layer portion of the active region and a fourth impurity region at a matched portion under the second element isolation structure and between the second element isolation structure and the second impurity region by doping a second impurity into a portion including the first element isolation structure and the second element isolation structure of the semiconductor substrate.
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Abstract
A channel stop region is formed immediately under an STI, and thereafter, an ion implantation is performed with conditions in which an impurity is doped into an upper layer portion of an active region, and at the same time, the impurity is also doped into immediately under another STI, and a channel dose region is formed at the upper layer portion of the active region, and another channel stop region is formed immediately under the STI.
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8 Claims
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1. A manufacturing method of a semiconductor device, comprising the steps of:
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forming trenches at plural element isolation regions of a semiconductor substrate respectively, and filling inside of the respective trenches with insulators; defining active regions on the semiconductor substrate by forming a first element isolation structure in a first trench and a second element isolation structure in a second trench respectively by removing a part of the insulator only from inside of the second trench; simultaneously forming a first impurity region at least at a lower portion of the first element isolation structure and a second impurity region at a first portion aligned to and under the second element isolation structure and deeper than the first impurity region by doping a first impurity into a portion including the first element isolation structure and the second element isolation structure of the semiconductor substrate; and simultaneously forming a third impurity region at a surface layer portion of the active region and a fourth impurity region at a matched portion under the second element isolation structure and between the second element isolation structure and the second impurity region by doping a second impurity into a portion including the first element isolation structure and the second element isolation structure of the semiconductor substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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