Electrostatic electron spectrometry apparatus
First Claim
Patent Images
1. An electrostatic electron spectrometry apparatus, comprising:
- a spectrometer that includes,a first deflection plate having a convex surface with a first radius of curvature;
a second deflection plate having a concave surface with a second radius of curvature larger than said first radius of curvature, said convex surface facing but spaced from said concave surface to define a curved space for passage of scattered electrons, said curved space having an electron entrance and an electron exit;
a first biasing source coupled to said first deflection plate to bias said first deflection plate to a first voltage; and
a second biasing source coupled to said second deflection plate to bias said second deflection plate to a second voltage, said second voltage being different from said first voltage to generate electric field lines inside said curved space;
wherein said spectrometer is configured so that said scattered electrons enter said curved space through said electron entrance along any trajectory residing in a predefined angular spread, are focused once at a first point inside said curved spaced, and focused subsequently at a second point outside said electron exit.
1 Assignment
0 Petitions
Accused Products
Abstract
An apparatus for spectrometry that includes a spectrometer configured for second order focusing and capable of 2π azimuthal collection.
-
Citations
21 Claims
-
1. An electrostatic electron spectrometry apparatus, comprising:
-
a spectrometer that includes, a first deflection plate having a convex surface with a first radius of curvature; a second deflection plate having a concave surface with a second radius of curvature larger than said first radius of curvature, said convex surface facing but spaced from said concave surface to define a curved space for passage of scattered electrons, said curved space having an electron entrance and an electron exit; a first biasing source coupled to said first deflection plate to bias said first deflection plate to a first voltage; and a second biasing source coupled to said second deflection plate to bias said second deflection plate to a second voltage, said second voltage being different from said first voltage to generate electric field lines inside said curved space; wherein said spectrometer is configured so that said scattered electrons enter said curved space through said electron entrance along any trajectory residing in a predefined angular spread, are focused once at a first point inside said curved spaced, and focused subsequently at a second point outside said electron exit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
-
-
16. A method for spectrometry, comprising:
-
generating an electric field around a central point and extending along a curved path between an electron entrance region and an electron exit region, said electric field including a plurality of spaced, curved equipotential lines, each line having a respective radius of curvature passing through said central point along a common radial direction; and passing scattered electrons through said electron entrance and into said electric field to perform first order focusing before said electrons reach said electron exit region and second order focusing after said electrons reach said electron exit region. - View Dependent Claims (17, 18, 19, 20, 21)
-
Specification