Display device and manufacturing method of the same
First Claim
1. A manufacturing method of a display device comprising:
- a film forming step in which a plurality of films including an insulation film, a semiconductor film and a conductive film are stacked onto a substrate; and
a defect portion correcting step in which at least one correction out of a short-circuit defect portion separation correction which separates a short-circuit defect, an open defect portion connection correction which performs a connection of an open defect, a standard deviation defect portion removal correction which performs a removal of a standard deviation defect, and a standard deviation defect portion separation correction which performs a separation of a standard deviation defect portion generated in the formed film is performed, whereinat a point of correction time of the defect portion correction step, at least one upper-layer film is present above a film to be corrected at the correction portion and the correction is applied to the film to be corrected while leaving the upper-layer film as it is,the correction is performed by irradiating laser beams,an output of the laser beams is set to 0.02 W/cm2 or less,the laser beams are irradiated from above the substrate through the upper-layer film to the correction portion, anda wavelength of the laser beams is set to a wavelength that allows the laser beams to be more easily absorbed in the film to be corrected than in the upper-layer film.
3 Assignments
0 Petitions
Accused Products
Abstract
Conventionally, when a protective/insulation film is present above a film to be corrected, only a defect of the film to be corrected below such an upper-layer film is corrected without damaging the upper-layer film. A display region of a display device has an insulation film, a semiconductor film and a conductive film formed in a given pattern and stacked on a substrate. When at least one of a correction portion out of a correction portion which separates a short-circuit defect, a correction portion which connects an opening defect, a correction portion which removes a standard deviation defect, and a correction portion which separates a standard deviation defect of the pattern is corrected, at least one upper-layer film is present above a film to be corrected at the correction portion and the correction is applied to the film to be corrected while leaving the upper-layer film intact.
6 Citations
12 Claims
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1. A manufacturing method of a display device comprising:
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a film forming step in which a plurality of films including an insulation film, a semiconductor film and a conductive film are stacked onto a substrate; and a defect portion correcting step in which at least one correction out of a short-circuit defect portion separation correction which separates a short-circuit defect, an open defect portion connection correction which performs a connection of an open defect, a standard deviation defect portion removal correction which performs a removal of a standard deviation defect, and a standard deviation defect portion separation correction which performs a separation of a standard deviation defect portion generated in the formed film is performed, wherein at a point of correction time of the defect portion correction step, at least one upper-layer film is present above a film to be corrected at the correction portion and the correction is applied to the film to be corrected while leaving the upper-layer film as it is, the correction is performed by irradiating laser beams, an output of the laser beams is set to 0.02 W/cm2 or less, the laser beams are irradiated from above the substrate through the upper-layer film to the correction portion, and a wavelength of the laser beams is set to a wavelength that allows the laser beams to be more easily absorbed in the film to be corrected than in the upper-layer film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification