Flexure based macro motion translation stage

• US 8,016,277 B2
• Filed: 08/21/2001
• Issued: 09/13/2011
• Est. Priority Date: 08/21/2000
• Status: Expired due to Fees

• Current Assignee: Board of Regents of the University of Texas System (University of Texas System)
• Original Assignee: Board of Regents of the University of Texas System (University of Texas System)
• Inventors: Sreenivasan, Sidlgata V., Choi, Byung J.
• Primary Examiner(s): Vargot; Mathieu D.
• Application Number:
  US09/934,248
• Publication Number:
  US 20020150398A1
• Time in Patent Office: 3,675 Days
• Field of Search: 269/55, 269/58, 269/71, 269/318, 33/1.M, 335/68
• US Class Current: 269/58
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
• CPC Class Codes: G03F 7/707 Chucks, e.g. chucking or un-chucking operations or structural details
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/70758 Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
• CPC Class Codes: H01L 21/682 Mask-wafer alignment in general G03F7/70, G03F9/70

Abstract

Described are flexure-based high precision positioning stages. The stages are constrained to motion along each axis by a system of symmetrical flexure linkages. The linkages may be formed of link coupled by flexure joints. Magnetic linear servomotors may provide motive force for the stages. In some embodiments, the stages may have no frictional contact joints.

Claims

1. An apparatus for positioning of an object in at least one plane comprising:

a holding member configured to hold the object to be positioned; and

a positioning system including a linkage coupled to the holding member, defining a first joint thereat, with said first joint being coupled to a second joint through a plurality of elongated members and a flexure joint, with said plurality of elongated members being coupled to said flexure joint to move at substantially the same rate and in opposite directions to facilitate movement of said holding member along first and second axes, with the first axis extending transversely to the second axis.

2. The apparatus of claim 1 wherein said plurality of elongated members consists of a pair of elongated members.

3. The apparatus of claim 1 wherein each of said plurality of elongated members is subjected to a pre-load.

4. The apparatus of claim 1 wherein said plurality of elongated members consists of a pair of elongated members coupled to said flexure contact joint to allow rotation between said pair of elongated members through a predetermined range of motion.

5. The apparatus of claim 1 wherein said plurality of elongated members consists of a pair of elongated members coupled to said flexure joint to allow rotation between said pair of elongated members through at least a 40 degree range of motion.

6. The apparatus of claim 1 wherein said positioning system further includes an additional linkage having an additional plurality of elongated members and an additional flexure joint with an additional plurality of elongated members coupled to said additional flexure joint to move at substantially the same rate in opposite directions.

7. The apparatus of claim 1, further comprising at least one motive device coupled to the holding member.

8. The apparatus of claim 1, further comprising at least one motive device coupled to the holding member, wherein each motive device comprises a magnetic linear servomotor.

9. The apparatus of claim 1, wherein the holding member comprises a wafer chuck.

10. The apparatus of claim 1, wherein the holding member is configured to hold a semiconductor substrate.

11. The apparatus of claim 1 wherein each of the elongated members of said plurality of elongated members has a common length.

12. The apparatus of claim 1 wherein said linkage is configured to minimize kinematic singularities.

13. An apparatus for positioning of an object along a first axis and a second axis comprising:

a holding member configured to hold the object to be positioned;

a platform coupled to the holding member;

a first set of flexure linkages coupled to the platform, defining a plurality of first joints thereat, with each of said first joints being coupled to a second joint through a first pair of elongated members and a first flexure joint so as to facilitate movement of said first pair of elongated members in opposing directions while facilitating movement of said platform along a first axis;

a second set of flexure linkages coupled to the platform, said second set of flexure linkages defining a plurality of third joints thereat, with each of said third joints being coupled to a fourth joint through a second pair of elongated members and a second flexure joint so as to facilitate movement of said second pair of elongated members in opposing directions while facilitating movement of said platform along a second axis;

a first motive device coupled to the holding member, wherein the first motive device is configured to move the holding member in relation to the platform along said first axis; and

a second motive device coupled to the platform, wherein the second motive device is configured to move the platform along said second axis.

14. The apparatus of claim 13 wherein said first pair of elongated members has a first common length and said second pair of elongated members has a second common length.

15. The apparatus of claim 13 wherein said first and second linkages are each configured to minimize kinematic singularities.

16. The apparatus of claim 13 wherein said first axis extends transversely to said second axis.

17. The apparatus of claim 13 wherein said first and second pairs of elongated members are subjected to pre-loading.

18. The apparatus of claim 13, wherein said first pair of elongated members is coupled to said first flexure joint to allow rotation between said first pair of elongated members through at least a 20 degree range of motion.

19. The apparatus of claim 13 wherein said first pair of elongated members is coupled to said first flexure joint to allow rotation between said first pair of elongated members through at least a 40 degree range of motion.

20. The apparatus of claim 13 wherein said second pair of elongated members is coupled said second flexure joint to allow rotation between said second pair of elongated members through at least a 20 degree range of motion.

21. The apparatus of claim 13 wherein said second pair of elongated members is coupled to said second flexure joint to allow rotation between said second pair of elongated members through a predetermined range of motion.

22. The apparatus of claim 13, wherein the first motive device comprises a magnetic linear servomotor.

23. The apparatus of claim 13, wherein the second motive device comprises a magnetic linear servomotor.

24. The apparatus of claim 13, wherein the first and second motive devices comprise magnetic linear servomotors.

25. The apparatus of claim 13, wherein the holding member comprises a wafer chuck.

26. The apparatus of claim 13, wherein the holding member is configured to hold a semiconductor substrate.

27. An apparatus for positioning of an object in a plane, said apparatus comprising:

a holding member retaining said object;

a linkage coupled to the holding member, defining a first joint thereat, with said first joint being coupled to ground through a plurality of elongated members and a flexure joint; and

a motive device coupled to the holding member for moving the holding member, with said plurality of elongated members being coupled to said flexure joint to move in opposite directions to facilitate movement of said holding member along an axis in response to movement of said holding member by said motive device.

28. The apparatus of claim 27 further including an additional linkage coupled to the holding member and including an additional plurality of elongated members coupled to an additional flexure joint, with said additional plurality of elongated members coupled to said additional flexure joint to move in opposite directions to facilitate movement of said holding member along an additional axis.

29. The apparatus of claim 27 wherein each of said plurality of elongated members are of a common length.

30. The apparatus of claim 28 wherein said axis extends transversely to said additional axis.

31. The apparatus of claim 28 wherein said plurality of elongated members consists of a pair of elongated members and said additional plurality of elongated members consists of an additional pair of elongated members.

32. The apparatus of claim 31 wherein said linkage is configured to allow rotation between said pair of elongated members through at least a 20 degree range of motion and said additional linkage is configured to allow rotation between said additional pair of elongated members through at least a 20 degree range of motion.

33. The apparatus of claim 31 wherein said linkage is configured to allow rotation between said pair of elongated members through a 40 degree range of motion and said additional linkage is configured to allow rotation between said additional pair of elongated members through at least a 40 degree range of motion.

34. The apparatus of claim 31 wherein said pair of elongated members and said additional pair of elongated members are pre-load.

35. The apparatus of claim 31 wherein said linkage is configured to constrain the motion of said pair of elongated members to rotate at substantially the same rate away from one another.

36. The apparatus of claim 35 wherein said additional linkage is configured to constrain the motion of said additional pair of elongated members to rotate at substantially the same rate away from one another.

37. The apparatus of claim 27 wherein the motive device comprises a magnetic linear servomotor.

38. The apparatus of claim 27 wherein the holding member comprises a wafer chuck.

39. The apparatus of claim 27 wherein the holding member is configured to hold a semiconductor wafer.