Structured silicon anode
First Claim
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1. A method of fabricating an energy storage device comprising the steps of:
- forming an anode comprising an array of spaced elongated structures extending from a substrate, wherein the elongated structures comprise silicon;
forming a cathode; and
arranging the anode and cathode in communication to form a battery.
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Abstract
A battery can be fabricated from a substrate including silicon. This allows the battery to be produced as an integrated unit. The battery includes an anode formed from an array of spaced elongated structures, such as pillars, which include silicon and which can be fabricated on the substrate. The battery also includes a cathode which can include lithium.
106 Citations
33 Claims
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1. A method of fabricating an energy storage device comprising the steps of:
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forming an anode comprising an array of spaced elongated structures extending from a substrate, wherein the elongated structures comprise silicon; forming a cathode; and arranging the anode and cathode in communication to form a battery. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of fabricating an energy storage device comprising the steps of:
forming an anode comprising; providing a substrate comprising silicon, removing material from the substrate to form a plurality of spaced pillars on the substrate; forming a cathode; and arranging the anode and cathode in communication to form a battery. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A method of fabricating an energy storage device comprising the steps of:
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forming an anode comprising a plurality of spaced elongated structures each mounted at one end to a substrate and extending away therefrom, wherein the elongated structures comprise silicon; forming a cathode; and arranging the anode and cathode in communication to form a battery. - View Dependent Claims (23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
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Specification