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Electromechanical system having a controlled atmosphere, and method of fabricating same

  • US 8,018,077 B2
  • Filed: 03/13/2009
  • Issued: 09/13/2011
  • Est. Priority Date: 03/20/2003
  • Status: Active Grant
First Claim
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1. An electromechanical device comprising:

  • a chamber including a first encapsulation layer having at least one vent;

    a mechanical structure, wherein the mechanical structure is disposed in the chamber; and

    a second encapsulation layer, deposited over or in the vent, to thereby seal the chamber, wherein the second encapsulation layer is a semiconductor material and wherein the chamber includes at least one relatively stable gas.

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