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Integrated thickness shear mode (TSM) sensor and surface acoustic wave (SAW) device for simultaneous sensing and removal of analytes

  • US 8,018,121 B1
  • Filed: 06/12/2009
  • Issued: 09/13/2011
  • Est. Priority Date: 06/12/2008
  • Status: Expired due to Fees
First Claim
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1. A sensor, comprising:

  • a substrate;

    a pair of substantially unidirectional surface acoustic wave (SAW) interdigital transducers (IDTs) on the substrate aligned to create an acoustic path that propagates an acoustic wave therebetween; and

    a thickness shear mode (TSM) electrode on the substrate positioned in the acoustic path between the pair of SAW IDTs.

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