Transducer with decoupled sensing in mutually orthogonal directions
First Claim
1. A transducer adapted to sense acceleration in at least two mutually orthogonal directions comprising:
- a substrate;
a first proof mass positioned in spaced apart relationship above a surface of said substrate and adapted for motion relative to a rotational axis, said first proof mass having an opening extending through said first proof mass;
a first anchor system formed on said surface of said substrate, said first anchor system pivotally coupling said first proof mass to said substrate at said rotational axis to enable said first proof mass to rotate about said rotational axis in response to said acceleration in a first direction of said mutually orthogonal directions;
a second proof mass residing in said opening and in spaced apart relationship above said surface; and
a second anchor system formed on said surface of said substrate and coupled with said second proof mass to enable said second proof mass to move substantially parallel to said surface of said substrate in response to said acceleration in a second direction of said mutually orthogonal directions.
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Accused Products
Abstract
A microelectromechanical systems (MEMS) transducer (90) is adapted to sense acceleration in mutually orthogonal directions (92, 94, 96). The MEMS transducer (90) includes a proof mass (100) suspended above a substrate (98) by an anchor system (116). The anchor system (116) pivotally couples the proof mass (100) to the substrate (98) at a rotational axis (132) to enable the proof mass (100) to rotate about the rotational axis (132) in response to acceleration in a direction (96). The proof mass (100) has an opening (112) extending through it. Another proof mass (148) resides in the opening (112), and another anchor system (152) suspends the proof mass (148) above the surface (104) of the substrate (98). The anchor system (152) enables the proof mass (148) to move substantially parallel to the surface (104) of the substrate (98) in response to acceleration in at least another direction (92, 94).
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Citations
20 Claims
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1. A transducer adapted to sense acceleration in at least two mutually orthogonal directions comprising:
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a substrate; a first proof mass positioned in spaced apart relationship above a surface of said substrate and adapted for motion relative to a rotational axis, said first proof mass having an opening extending through said first proof mass; a first anchor system formed on said surface of said substrate, said first anchor system pivotally coupling said first proof mass to said substrate at said rotational axis to enable said first proof mass to rotate about said rotational axis in response to said acceleration in a first direction of said mutually orthogonal directions; a second proof mass residing in said opening and in spaced apart relationship above said surface; and a second anchor system formed on said surface of said substrate and coupled with said second proof mass to enable said second proof mass to move substantially parallel to said surface of said substrate in response to said acceleration in a second direction of said mutually orthogonal directions. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A transducer adapted to sense acceleration in at least two mutually orthogonal directions, said transducer comprising:
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a substrate; a first proof mass positioned in spaced apart relationship above a surface of said substrate and adapted for motion relative to a rotational axis, said first proof mass having an opening extending through said first proof mass, said opening exhibiting a first centerline that is coaxial with said rotational axis; a first anchor system formed on said surface of said substrate, said first anchor system pivotally coupling said first proof mass to said substrate at said rotational axis to enable said first proof mass to rotate about said rotational axis in response to said acceleration in a first direction of said mutually orthogonal directions; a second proof mass residing in said opening and in spaced apart relationship above said surface, said second proof mass exhibiting a second centerline that is coaxial with said first centerline; and a second anchor system formed on said surface of said substrate and coupled with said second proof mass to enable said second proof mass to move substantially parallel to said surface of said substrate in response to said acceleration in a second direction of said mutually orthogonal directions. - View Dependent Claims (16, 17)
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18. A transducer adapted to sense acceleration in at least two mutually orthogonal directions, said transducer comprising:
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a substrate; a first proof mass positioned in spaced apart relationship above a surface of said substrate and adapted for motion relative to a rotational axis, said first proof mass having an opening extending through said first proof mass, said opening being defined by an inner peripheral wall; a first anchor system formed on said surface of said substrate, said first anchor system pivotally coupling said first proof mass to said substrate at said rotational axis to enable said first proof mass to rotate about said rotational axis in response to said acceleration in a first direction of said mutually orthogonal directions, said first anchor system including a first pivot element attached to said first proof mass at a first side of said inner peripheral wall and a second pivot element attached to said first proof mass at a second side of said inner peripheral wall, said second side of said inner peripheral wall opposing said first side of said inner peripheral wall; a second proof mass residing in said opening and in spaced apart relationship above said surface; and a second anchor system formed on said surface of said substrate and coupled with said second proof mass to enable said second proof mass to move substantially parallel to said surface of said substrate in response to said acceleration in a second direction of said mutually orthogonal directions, said second anchor system including multiple spring elements offset from said rotational axis and symmetrically arranged relative to said rotational axis. - View Dependent Claims (19, 20)
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Specification