Sensor and a method of making a sensor
First Claim
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1. A thin film sensor for measuring pressure or mechanical displacement comprising:
- a first substrate having a load receiving side and an opposed conducting element side;
a plurality of conducting elements located on the first substrate at the conducting element side in positions spaced apart from one another;
a deformable second substrate located on the conducting element side of the first substrate; and
at least one deformable electrolyte bridge located on the deformable second substrate and contacting each of the conducting elements at one or more contact points, said contact points having an aggregate contact area,wherein, upon formation of an ionic circuit between two of the conducting elements, a first resistivity exists between said two conducting elements when the first substrate is in an unloaded state at a location at or about said two conducting elements, and a second resistivity exists between said two conducting elements when the first substrate is in a loaded state at said location and the at least one deformable electrolyte bridge is deformed at or about said location in an amount to increase the aggregate contact area.
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Abstract
A sensor is provided, which includes a plurality of conducting elements spaced apart from each other and at least one deformable electrolyte bridge contacting each of the conducting elements at one or more contact points having an aggregate contact area. Upon formation of an ionic circuit between two of the conducting elements, a first resistivity between the two conducting element exists. Upon application of a compressive force on the at least one deformable electrolyte bridge directed toward at least one of the conducting elements, the aggregate contact area increases such that a second resistivity between the two conducting elements exists.
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Citations
24 Claims
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1. A thin film sensor for measuring pressure or mechanical displacement comprising:
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a first substrate having a load receiving side and an opposed conducting element side; a plurality of conducting elements located on the first substrate at the conducting element side in positions spaced apart from one another; a deformable second substrate located on the conducting element side of the first substrate; and at least one deformable electrolyte bridge located on the deformable second substrate and contacting each of the conducting elements at one or more contact points, said contact points having an aggregate contact area, wherein, upon formation of an ionic circuit between two of the conducting elements, a first resistivity exists between said two conducting elements when the first substrate is in an unloaded state at a location at or about said two conducting elements, and a second resistivity exists between said two conducting elements when the first substrate is in a loaded state at said location and the at least one deformable electrolyte bridge is deformed at or about said location in an amount to increase the aggregate contact area. - View Dependent Claims (2, 3, 4, 5, 6, 7, 17)
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8. A thin film sensor comprising:
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a plurality of conducting elements spaced apart from each other; and at least one deformable electrolyte bridge contacting each of the conducting elements at one or more contact points having an aggregate contact area such that upon formation of an ionic circuit between two of the conducting elements, a first resistivity between the two conducting element exists, and upon application of a compressive force on the at least one deformable electrolyte bridge directed toward at least one of the conducting elements, the aggregate contact area increases such that a second resistivity between the two conducting elements exists. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 18)
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19. A method for making a sensor comprising:
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disposing a plurality of conducting elements at positions spaced apart from each other; and disposing at least one deformable electrolyte bridge onto the conducting elements at one or more contact points having an aggregate contact area such that upon formation of an ionic circuit between two of the conducting elements, a first resistivity between the two conducting element exists, and upon application of a compressive force on the at least one deformable electrolyte bridge directed toward at least one of the conducting elements, the aggregate contact area increases such that a second resistivity between the two conducting elements exists. - View Dependent Claims (20, 21, 22, 23)
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24. A method of sensing a pressure differential comprising:
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locating a sensor at a site where it is desired to sense a pressure change, the sensor comprising a plurality of conducting elements spaced apart from each other and at least one deformable electrolyte bridge contacting each of the conducting elements at one or more contact points having an aggregate contact area; forming of an ionic circuit between two of the conducting elements; measuring a first resistivity between the two conducting elements; upon application of a compressive force on the at least one deformable electrolyte bridge directed toward at least one of the conducting elements to cause a change in the aggregate contact area, measuring a second resistivity between the two conducting elements; and comparing the first and second resistivity to identify a pressure or pressure change at the site.
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Specification