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Semiconductor device

  • US 8,022,474 B2
  • Filed: 09/30/2008
  • Issued: 09/20/2011
  • Est. Priority Date: 09/30/2008
  • Status: Expired due to Fees
First Claim
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1. A semiconductor device, comprising:

  • a source metallization;

    a first field-effect structure including a source region of a first conductivity type, the source region being electrically connected to the source metallization;

    a body region of a second conductivity type adjacent to the source region;

    a first gate electrode and a first insulating region which is arranged at least between the first gate electrode and the body region, the first gate electrode, the first insulating region and the body region forming a first capacitance, the first capacitance having a first capacitance per unit area;

    wherein the first gate electrode is in a trench in the body region;

    a second field-effect structure including a source region of the first conductivity type;

    a body region of the second conductivity type adjacent to the source region;

    a second gate electrode and a second insulating region which is arranged at least between the second gate electrode and the body region, the source region and the second gate electrode being electrically connected to the source metallization;

    the second gate electrode, the second insulating region and the body region forming a second capacitance, the second capacitance having a second capacitance per unit area;

    wherein the second gate electrode is in a trench in the body region;

    the second capacitance per unit area being larger than the first capacitance per unit area;

    the first insulating region having a first thickness d1 between the first gate electrode and the body region;

    the second insulating region having a second thickness d2 between the second gate electrode and the body region; and

    wherein the second thickness d2 is smaller than the first thickness d1.

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