Mirror device

• US 8,023,172 B2
• Filed: 07/25/2008
• Issued: 09/20/2011
• Est. Priority Date: 08/30/2006
• Status: Expired due to Fees

• Current Assignee: Ignite USA (Ignite)
• Original Assignee: Olympus Corporation, Silicon Quest Kabushiki-Kaisha
• Inventors: Maeda, Yoshihiro, Sugimoto, Naoya, Ichikawa, Hirotoshi, Ishii, Fusao
• Primary Examiner(s): CHOI, WILLIAM C
• Application Number:
  US12/220,501
• Publication Number:
  US 20080285111A1
• Time in Patent Office: 1,152 Days
• Field of Search: 359212-214, 359/224, 359290-292, 359/198.1, 359/214.1, 359/224.1
• US Class Current: 359/290
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A mirror device, comprising: a mirror; an electrode which is placed on a substrate and on which surface a cavity is formed; and a hinge placed between the mirror and electrode, wherein the hinge is connected to the cavity of the electrode.

Claims

1. A mirror device, comprising:

a substrate having a wiring circuit disposed on a top surface of the substrate covered under an insulation layer;

an electrode disposed on top of the insulation layer and connected to the wiring circuit through a via connector penetrating through an opening in the insulation layer; and

a micro-electrical mechanical system (MEMS) structure directly connected to the electrode.

2. The mirror device according to claim 1, wherein:

the electrode further includes a top portion to support the MEMS structure wherein the MEMS structure further comprises an elastic part of a hinge.

3. The mirror device according to claim 1, wherein:

the electrode is further composed of an electrically conductive material includes at least one of a group of materials consisting of a metallic conductive material, a cooper, an aluminum, a tungsten, and an alloy of the metallic material.