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Mirror device

  • US 8,023,172 B2
  • Filed: 07/25/2008
  • Issued: 09/20/2011
  • Est. Priority Date: 08/30/2006
  • Status: Expired due to Fees
First Claim
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1. A mirror device, comprising:

  • a substrate having a wiring circuit disposed on a top surface of the substrate covered under an insulation layer;

    an electrode disposed on top of the insulation layer and connected to the wiring circuit through a via connector penetrating through an opening in the insulation layer; and

    a micro-electrical mechanical system (MEMS) structure directly connected to the electrode.

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