Cleaning method
First Claim
1. A cleaning method using a cleaning apparatus including (1) an adhesive sheet including a base material and an adhesive surface, (2) a flexible conductive sheet in contact with the base material of the adhesive sheet, and (3) a pressing member configured to press the flexible conductive sheet onto the adhesive sheet, the pressing member including (a) a voltage applying mechanism configured to apply either of a positive or a negative voltage to the flexible conductive sheet at a point in time and (b) a pressing force controlling mechanism configured to press the adhesive sheet onto a curved surface of a portion of a vacuum processing apparatus to be cleaned by the cleaning apparatus from above the flexible conductive sheet, the cleaning method comprising:
- a first step of pressing the pressing member by a pressing force controlled via the pressing force controlling mechanism so as to press the flexible conductive sheet and the adhesive sheet in order to closely adhere the adhesive surface of the adhesive sheet to the curved surface of the portion of the vacuum processing apparatus to be cleaned by the cleaning apparatus; and
a second step of applying either of a positive or a negative voltage at a point in time to the flexible conductive sheet or applying voltage having temporally changed polarity from the voltage applying mechanism;
wherein _ the first step removes particles attached to the curved surface of the portion of the vacuum processing apparatus to be cleaned by the cleaning apparatus, while the second step generates electrostatic attraction force to attract and remove particles attached to the curved surface of the portion of the vacuum processing apparatus to be cleaned by the cleaning apparatus.
1 Assignment
0 Petitions
Accused Products
Abstract
A cleaning method using a cleaning apparatus having an adhesive sheet, a conductive sheet in contact with a base material of the adhesive sheet, and a pressing member for pressing the conductive sheet onto the adhesive sheet. The pressing member includes a voltage applier, and a pressing force controller which presses the adhesive sheet onto a curved surface of a portion to be cleaned of a vacuum processing apparatus from above the conductive sheet. The method includes pressing the pressing member by a pressing force controlled via the pressing force controller to press the conductive sheet and the adhesive sheet to adhere an adhesive surface of the adhesive sheet to the curved surface of the portion to be cleaned, and applying a voltage to the conductive sheet or applying a voltage having a temporally changed polarity.
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Citations
2 Claims
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1. A cleaning method using a cleaning apparatus including (1) an adhesive sheet including a base material and an adhesive surface, (2) a flexible conductive sheet in contact with the base material of the adhesive sheet, and (3) a pressing member configured to press the flexible conductive sheet onto the adhesive sheet, the pressing member including (a) a voltage applying mechanism configured to apply either of a positive or a negative voltage to the flexible conductive sheet at a point in time and (b) a pressing force controlling mechanism configured to press the adhesive sheet onto a curved surface of a portion of a vacuum processing apparatus to be cleaned by the cleaning apparatus from above the flexible conductive sheet, the cleaning method comprising:
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a first step of pressing the pressing member by a pressing force controlled via the pressing force controlling mechanism so as to press the flexible conductive sheet and the adhesive sheet in order to closely adhere the adhesive surface of the adhesive sheet to the curved surface of the portion of the vacuum processing apparatus to be cleaned by the cleaning apparatus; and a second step of applying either of a positive or a negative voltage at a point in time to the flexible conductive sheet or applying voltage having temporally changed polarity from the voltage applying mechanism; wherein _ the first step removes particles attached to the curved surface of the portion of the vacuum processing apparatus to be cleaned by the cleaning apparatus, while the second step generates electrostatic attraction force to attract and remove particles attached to the curved surface of the portion of the vacuum processing apparatus to be cleaned by the cleaning apparatus. - View Dependent Claims (2)
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Specification