Method of performing an operation with rheological compound
First Claim
1. A method of performing an operation on a substrate, the method comprising:
- selectively positioning a first lens coaxially with an optical path of an imaging block to focus a camera disposed in the imaging block on a structure formed on the substrate to enable capturing of an image of the structure to review the structure;
delivering a laser beam along the optical path to the structure;
selectively positioning the first lens coaxially with the optical path if the reviewed structure is identified as requiring material removal;
focusing the laser beam on the structure using the first lens so as to remove a material present in the structure;
positioning a ribbon coated with a rheological compound in the path of the laser beam;
selectively positioning a second lens coaxially with the optical path if the reviewed structure is identified as requiring material transfer;
focusing the laser beam on the ribbon using the second lens so as to transfer the rheological compound to the structure;
maintaining a distance between the substrate and the first lens within the predefined range during the material removal; and
maintaining a distance between the ribbon and the second lens within the predefined range during the transfer of the rheological compound.
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Accused Products
Abstract
An apparatus includes integrated review, material removal and material deposition functions. The apparatus performs the review, material removal and material deposition operations along the same optical axis. The apparatus includes, in part, a camera, a pair of lenses, and one or more lasers. A first lens is used to focus the camera along the optical axis on a structure formed on the target substrate undergoing review. The first lens is also used to focus the laser beam on the structure to remove a material present thereon if the reviewed structure is identified as requiring material removal. The second lens is used to focus the laser beam on a ribbon to transfer a rheological compound from a recessed well formed in the ribbon to the structure if the reviewed structure is identified as requiring material deposition.
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Citations
29 Claims
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1. A method of performing an operation on a substrate, the method comprising:
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selectively positioning a first lens coaxially with an optical path of an imaging block to focus a camera disposed in the imaging block on a structure formed on the substrate to enable capturing of an image of the structure to review the structure; delivering a laser beam along the optical path to the structure; selectively positioning the first lens coaxially with the optical path if the reviewed structure is identified as requiring material removal; focusing the laser beam on the structure using the first lens so as to remove a material present in the structure; positioning a ribbon coated with a rheological compound in the path of the laser beam; selectively positioning a second lens coaxially with the optical path if the reviewed structure is identified as requiring material transfer; focusing the laser beam on the ribbon using the second lens so as to transfer the rheological compound to the structure; maintaining a distance between the substrate and the first lens within the predefined range during the material removal; and maintaining a distance between the ribbon and the second lens within the predefined range during the transfer of the rheological compound. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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Specification