Exposure apparatus, and device manufacturing method

• US 8,027,027 B2
• Filed: 04/19/2007
• Issued: 09/27/2011
• Est. Priority Date: 06/19/2003
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Ebihara, Akimitsu
• Primary Examiner(s): NGUYEN, HUNG
• Application Number:
  US11/785,716
• Publication Number:
  US 20070211234A1
• Time in Patent Office: 1,622 Days
• Field of Search: 355/30, 355/53, 355/55, 355/67, 355/72, 250/548
• US Class Current: 355/72
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: G03F 7/70225 Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements
• CPC Class Codes: G03F 7/70325 Resolution enhancement techniques not otherwise provided for, e.g. darkfield imaging, interfering beams, spatial frequency multiplication, nearfield lenses or solid immersion lenses
• CPC Class Codes: G03F 7/70333 Focus drilling, i.e. increase in depth of focus for exposure by modulating focus during exposure [FLEX]
• CPC Class Codes: G03F 7/70341 Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply chemical composition of immersion liquids G03F7/2041
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/70725 control
• CPC Class Codes: G03F 7/70733 Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
• CPC Class Codes: G03F 7/70758 Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
• CPC Class Codes: G03F 7/70816 Bearings
• CPC Class Codes: Y10T 29/49826 Assembling or joining

Abstract

A lithographic projection apparatus includes a substrate table that holds a substrate, a projection system that projects a patterned beam of radiation onto the substrate, and a liquid confinement structure that confines a liquid in a space between the projection system and the substrate, the substrate, the substrate table, or both, to form a part of a boundary of the space. In addition, a closing plate forms a part of a boundary of the space in place of the substrate, the substrate table, or both, when moved without substantially disturbing the liquid, the liquid confinement structure, or both.

Claims

1. A lithographic apparatus comprising:

a measuring system that measures characteristics of substrates in a first area of the apparatus;

a projection system that projects a patterned radiation beam onto a substrate in a second area of the apparatus;

a liquid confinement system that at least partly confines liquid in a space between the projection system and the substrate;

at least two substrate stages each of which holds a substrate; and

a positioning system that moves the stages between the first area and the second area, and during exposure, positions one of the stages holding a substrate in the second area on the basis of at least one measured characteristic of that substrate;

wherein

the stages are positionable so as to be close to or in contact with each other in order to perform a simultaneous movement of the stages to bring the lithographic apparatus from a first state in which the liquid is confined between a first substrate held by a first stage of the substrate stages and the projection system, to a second state in which the liquid is confined between a second substrate held by a second stage of the substrate stages and the projection system, such that during the simultaneous movement the liquid is essentially confined within the space in contact with the projection system.

2. The lithographic apparatus according to claim 1, wherein each of the first stage and the second stage has a side surface which cooperates with a side surface of another stage during the simultaneous movement.

3. The lithographic apparatus according to claim 2, wherein each of the side surfaces comprises an essentially planar surface.

4. The lithographic apparatus according to claim 2, wherein the positioning system positions the respective stages during the simultaneous movement such that their respective side surfaces remain at an essentially mutual constant spacing.

5. A lithographic product with a lithographic apparatus according to claim 1.

6. A manufacturing method of manufacturing a lithographic apparatus, the method comprising:

providing a measuring system that measures characteristics of substrates in a first area of the apparatus;

providing a projection system that projects a patterned radiation beam onto a substrate in a second area of the apparatus;

providing a liquid confinement system that at least partly confines liquid in a space between the projection system and the substrate;

providing at least two substrate stages each of which holds a substrate, the substrate stages being positionable so as to be close to or in contact with each other in order to perform a simultaneous movement of the stages to bring the lithographic apparatus from a first state in which the liquid is confined between a first substrate held by a first stage of the substrate stages and the projection system, to a second state in which the liquid is confined between a second substrate held by a second stage of the substrate stages and the projection system, such that during the simultaneous movement the liquid is essentially confined within the space in contact with the projection system; and

providing a positioning system that moves the stages between the first area and the second area, and during exposure, positions one of the stages holding a substrate in the second area on the basis of at least one measured characteristic of that substrate.

7. An exposure method, comprising:

moving at least two substrate stages each of which holds a substrate between a first area where measurement of characteristics of substrates is performed and a second area where a patterned radiation beam is projected from a projection system onto a substrate, and during exposure, positioning one of the stages holding a substrate in the second area on the basis of at least one measured characteristic of that substrate; and

positioning the stages so as to be close to or in contact with each other in order to perform a simultaneous movement of the stages to bring the lithographic apparatus from a first state in which the liquid is confined between a first substrate held by a first stage of the substrate stages and the projection system, to a second state in which the liquid is confined between a second substrate held by a second stage of the substrate stages and the projection system, such that the liquid is essentially confined within the space in contact with the projection system.

8. The exposure method according to claim 7, wherein

each of the first stage and the second stage has a side surface which cooperates with a side surface of another stage during the simultaneous movement.

9. The exposure method according to claim 8, wherein

each of the side surfaces comprises an essentially planar surface.

10. The exposure method according to claim 7, wherein

during the simultaneous movement, the respective stages are positioned such that their respective side surfaces remain at an essentially mutual constant spacing.

11. A device manufacturing method, comprising:

exposing a substrate by using the exposure method according to claim 7; and

developing the substrate that has been exposed.