Multilayer wire-grid polarizer with off-set wire-grid and dielectric grid

• US 8,027,087 B2
• Filed: 09/10/2010
• Issued: 09/27/2011
• Est. Priority Date: 12/06/2004
• Status: Expired due to Fees

• Current Assignee: Moxtek Inc (Nippon Kayaku Company Limited)
• Original Assignee: Moxtek Inc (Nippon Kayaku Company Limited)
• Inventors: Cheng, Cheng-Yuan, Hansen, Douglas P., Perkins, Raymond T., Gardner, Eric W.
• Primary Examiner(s): Lavarias; Arnel C
• Application Number:
  US12/879,315
• Publication Number:
  US 20100328770A1
• Time in Patent Office: 382 Days
• Field of Search: None
• US Class Current: 359/485.05
• CPC Class Codes: G02B 5/3058 comprising electrically conductive elements, e.g. wire grids, conductive particles

Abstract

A wire-grid polarizer includes a wire-grid layer disposed over a substrate. A plurality of contiguous dielectric-grid layers are contiguous with one another and disposed directly on top of the wire-grid layer. The plurality of contiguous dielectric-grid layers includes different materials with different indices of refraction. The array of dielectric material elements and the array of metal elements are oriented substantially parallel with one another, and the arrays having substantially equal periods.

Claims

1. A wire-grid polarizer device for polarizing light, comprising:

a) a substrate;

b) a wire-grid layer, disposed over the substrate, the wire-grid layer including an array of elongated metal elements having lengths longer than a wavelength of the light and a period less than half the wavelength of the light and defining gaps between the elements; and

c) a plurality of contiguous dielectric-grid layers contiguous with one another, disposed directly on top of the wire-grid layer, each dielectric-grid layer including an array of dielectric material elements, the plurality of contiguous dielectric-grid layers including different materials with different indices of refraction; and

d) the array of dielectric material elements and the array of metal elements being oriented substantially parallel with one another, and the arrays having substantially equal periods.

2. A device in accordance with claim 1, further comprising:

at least one continuous thin film layer disposed between the wire-grid layer and the substrate and extending between the gaps.

3. A device in accordance with claim 2, wherein the at least one continuous thin film layer comprises a plurality of continuous thin film layers with different refractive indices with respect to one another, disposed between the wire-grid layer and the substrate and extending between the gaps.

4. A device in accordance with claim 3, wherein at least one of the continuous thin film layers includes a dielectric grid including an array of dielectric material elements.

5. A device in accordance with claim 2, further comprising at least one continuous thin film layer disposed over the plurality of contiguous dielectric-grid layers.

6. A device in accordance with claim 5, wherein the at least one continuous thin film layer disposed over the plurality of contiguous dielectric-grid layers comprises a plurality of continuous thin film layers with different refractive indices with respect to one another.

7. A device in accordance with claim 5, wherein the at least one continuous thin film layer disposed over the plurality of contiguous dielectric-grid layers includes a dielectric grid including an array of dielectric material elements.

8. A device in accordance with claim 1, wherein an index of refraction of a lower of the plurality of contiguous dielectric-grid layers is less than an index of refraction of an upper of the plurality of contiguous dielectric-grid layers.

9. A device in accordance with claim 1, further comprising grooves etched in the substrate to form ribs extending therefrom, wherein the wire-grid layer is supported on the ribs.

10. A device in accordance with claim 1, wherein:

the elongated metal elements comprise aluminum;

at least two of the at least two film layers comprises silicon.

11. A device in accordance with claim 10, wherein at least one of the at least two film layers comprises silicon dioxide.

12. A device in accordance with claim 1, wherein the wire grid layer and the at least two film layers in combination define an array of ribs, wherein a width of an individual rib is approximately the same at a base of the individual rib as at a top of the individual rib.

13. A device in accordance with claim 1, wherein the wire grid layer and the at least two film layers in combination define an array of ribs with gaps therebetween, wherein a distance between ribs at a base of the ribs is approximately the same as a distance between the ribs at a top of the ribs.

14. A device in accordance with claim 1, wherein the elongated metal elements comprise aluminum;

the at least two film layers comprise at least three film layers;

at least one of the at least three film layers comprises silicon dioxide;

another at least one of the at least three film layers comprises silicon; and

another at least one of the at least three film layers comprises tantalum.

15. A wire-grid polarizer device for polarizing light, comprising:

a) a substrate;

b) a stack of thin film layers, disposed over the substrate, and extending continuously across the substrate;

c) at least one of the thin film layers being uniform in structure and material;

d) at least one of the thin film layers including a wire-grid array of elongated metal elements having lengths longer than a wavelength of the light and a period less than half the wavelength of the light and a period less than half the wavelength of the light and defining gaps between the elements; and

e) at least two of the thin film layers including contiguous dielectric arrays of dielectric material elements disposed directly on top of the wire-grid array, wherein the dielectric array of dielectric material elements and the wire-grid array of elongated metal elements are oriented substantially parallel with one another and the arrays have substantially equal periods, and wherein, the contiguous dielectric arrays include different materials with different indices of refraction.

16. A device in accordance with claim 15, wherein the dielectric material and metal elements of the arrays are oriented substantially parallel with one another, and the arrays having substantially equal periods.

17. A device in accordance with claim 16, wherein dielectric material elements of the dielectric grid are aligned above the metal elements of the wire grid layer.

18. A device in accordance with claim 16, wherein dielectric material elements of the dielectric grid are off-set above the metal elements of the wire grid layer.

19. A device in accordance with claim 15, further comprising:

at least one thin film layer, disposed between the substrate and the wire-grid layer.

20. A device in accordance with claim 19, wherein the at least one thin film layer includes a plurality of thin film layers with different refractive indices with respect to one another.

21. A device in accordance with claim 19, wherein at least one of the thin film layers between the substrate and the wire-grid layer has a refractive index greater than a refractive index of the substrate.

22. A device in accordance with claim 19, wherein the at least one thin film layer extends continuously across the substrate.

23. A device in accordance with claim 19, further comprising:

at least one other thin film layer, disposed over the dielectric layer.