Pressure sensor and method for manufacturing the same

• US 8,028,584 B2
• Filed: 07/29/2008
• Issued: 10/04/2011
• Est. Priority Date: 08/20/2007
• Status: Active Grant

• Current Assignee: DENSO Corporation
• Original Assignee: DENSO Corporation
• Inventors: Otsuka, Kiyoshi, Toyoda, Inao, Kakoiyama, Naoki, Fukada, Tsuyoshi, Makino, Yasuaki
• Primary Examiner(s): Kirkland, III; Freddie
• Application Number:
  US12/219,785
• Publication Number:
  US 20090049921A1
• Time in Patent Office: 1,162 Days
• Field of Search: 737/06, 737/15, 737/23, 737/53, 737/56
• US Class Current: 73/706
• CPC Class Codes: G01L 19/0069 from the sensor to its support
• CPC Class Codes: G01L 19/0084 to the outside of the housing other details about the housing see G01L19/14
• CPC Class Codes: G01L 19/0092 Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature G01L9/025, G01L9/045, G01L9/065, G01L9/085, G01L9/105, G01L9/125, G01L19/02, G01L19/04 take precedence; measuring two or more variable G01D21/02; temperature sensors with pressure compensation G01K1/26
• CPC Class Codes: G01L 19/141 Monolithic housings, e.g. molded or one-piece housings
• CPC Class Codes: G01L 19/143 Two part housings
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2224/73265 Layer and wire connectors
• CPC Class Codes: H01L 24/32 of an individual layer connector
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2924/181 Encapsulation
• CPC Class Codes: H01L 2924/351 Thermal stress
• CPC Class Codes: Y10T 29/49002 Electrical device making

Abstract

A pressure sensor includes: a housing having a pressure introduction port; and a connector case integrated with the housing. The connector case includes: a protruding portion that protrudes in the pressure introduction port along with the introduction direction from one end of the connector case, and has a concavity hollowed in a direction perpendicular to the introduction direction; a sensor chip having a pressure gauge on one surface of the chip in the concavity; a terminal having one end inserted and molded in the connector case; and a bonding wire that electrically connects the sensor chip and the one end of the terminal. The connector case seals a connection portion between the bonding wire and the terminal, a connection portion between the boding wire and the sensor chip, and the bonding wire.

Claims

1. A pressure sensor comprising:

a housing having a pressure introduction port; and

a connector case integrated with the housing,

wherein the pressure introduction port has a first opening for introducing a pressure medium into the pressure introducing port along with an introduction direction so that the pressure medium reaches the connector case,

wherein the connector case includes;

a protruding portion that protrudes in the pressure introduction port along with the introduction direction from one end of the connector case, and has a concavity hollowed in a direction perpendicular to the introduction direction;

a sensor chip that has a gauge for detecting pressure disposed on one surface of the chip, and is disposed in the concavity so that the one surface of the chip is parallel to the introduction direction;

a terminal having one end, which is inserted and molded in the connector case so that the one end is sealed by the connector case; and

a bonding wire that electrically connects the sensor chip and the one end of the terminal, and

wherein the connector case seals a connection portion between the bonding wire and the terminal, a connection portion between the boding wire and the sensor chip, and the bonding wire.

2. The pressure sensor according to claim 1,

wherein the protruding portion has a plurality of protrusions, each of which is disposed on a side of the protruding portion, and

wherein the plurality of protrusions protrudes along with the direction perpendicular to the introduction direction.

3. The pressure sensor according to claim 1,

wherein the pressure introduction port further has a second opening, in which the protruding portion is inserted,

wherein the second opening of the pressure introduction port has a tapered surface.

4. The pressure sensor according to claim 1,

wherein the connector case further includes a reinforce terminal, which is inserted and molded in the connector case, and

wherein the reinforce terminal faces the sensor chip and is disposed in parallel to the introduction direction.

5. The pressure sensor according to claim 1,

wherein the protruding portion reaches the first opening of the pressure introduction port,

wherein the connector case further includes a thermistor, a thermistor terminal and a connector opening,

wherein the connector opening is disposed opposite to the one end of the connector case,

wherein the thermistor is inserted and molded in a top portion of the protruding portion,

wherein the thermistor terminal has a bar shape, and

wherein one end of the thermistor terminal is coupled with the thermistor via a lead wire, and the thermistor terminal is inserted and molded in the connector case in such a manner that the other end of the thermistor terminal is exposed in the connector opening.

6. The pressure sensor according to claim 5,

wherein the thermistor terminal faces at least the sensor chip, and is in parallel to the introduction direction.

7. A pressure sensor comprising:

a housing having a pressure introduction port; and

a connector case integrated with the housing,

wherein the pressure introduction port has a first opening for introducing a pressure medium into the pressure introducing port along with an introduction direction so that the pressure medium reaches the connector case,

wherein the connector case includes;

a sensor chip that has a gauge for detecting pressure disposed on one surface of the sensor chip, and is disposed in parallel to the introduction direction, the one surface being exposed from one end of the connector case;

a terminal having one end, which is inserted and molded in the connector case so that the one end is sealed by the connector case; and

a bonding wire that electrically connects the sensor chip and the one end of the terminal, and

wherein the connector case seals a connection portion between the bonding wire and the terminal, a connection portion between the boding wire and the sensor chip, and the bonding wire.

8. The pressure sensor according to claim 7,

wherein a boundary between the sensor chip and the one end of the connector case is sealed with a sealing member.

9. A pressure sensor comprising:

a housing having a pressure introduction port; and

a connector case integrated with the housing,

wherein the pressure introduction port has a first opening for introducing a pressure medium into the pressure introducing port along with an introduction direction so that the pressure medium reaches the connector case, and

wherein the connector case includes;

a protruding portion that protrudes in the pressure introduction port along with the introduction direction from one end of the connector case, and has a concavity hollowed in a direction perpendicular to the introduction direction;

a sensor chip that has a gauge for detecting pressure disposed on one surface of the chip, and is disposed in the concavity so that the one surface of the chip is parallel to the introduction direction; and

a terminal having one end, which is inserted and molded in the connector case and electrically connected to the sensor chip directly without using a bonding wire.

10. The pressure sensor according to claim 9,

wherein the sensor chip has a rectangular plate shape with a pair of long sides and a pair of short sides, and

wherein each long side is parallel to the introduction direction, and each short side is perpendicular to the introduction direction.

11. A pressure sensor comprising:

a housing having a pressure introduction port; and

a connector case integrated with the housing,

wherein the pressure introduction port has a first opening for introducing a pressure medium into the pressure introducing port along with an introduction direction so that the pressure medium reaches the connector case,

wherein the connector case includes;

a protruding portion that protrudes in the pressure introduction port along with the introduction direction from one end of the connector case;

a first chip that has a gauge for detecting pressure disposed on one surface of the chip, and is disposed on one surface of the protruding portion, which is parallel to the introduction direction;

a second chip having a circuit for processing a signal output from the first chip, and inserted and molded in the connector case in such a manner that the second chip is parallel to the introduction direction;

an internal connection terminal having a bar shape and having one end and the other end, the one end electrically connected to the first chip, and the other end connected to the second chip via a first bonding wire; and

an external connection terminal having a bar shape and having one end connected to the second chip via a second bonding wire, and

wherein the connector case seals the internal connection terminal, a connection portion between the internal connection terminal and the first bonding wire, the first bonding wire, a connection portion between the first boding wire and the second chip, and the second chip, a connection portion between the second chip and the second bonding wire, the second bonding wire, a connection portion between the second bonding wire and the external connection terminal.

12. A pressure sensor comprising:

a housing having a pressure introduction port; and

a case having one end integrated in the housing,

wherein the pressure introduction port has an opening for introducing a pressure medium into the pressure introducing port along with an introduction direction so that the pressure medium reaches the one end of the case,

wherein the case includes;

a groove disposed on the one end of the case, and hollowed in the introduction direction;

a terminal inserted and molded in the case, and has one end exposed in the groove; and

a sensor chip having one surface parallel to the introduction direction, and including a gage for detecting pressure,

wherein the gauge is disposed on the one surface of the sensor chip around one end of the sensor chip,

wherein the one end of the sensor chip is disposed on an opening side,

wherein the sensor chip further includes the other end, which is opposite to the one end, and disposed on a groove side, and

wherein the other end of the sensor chip is electrically coupled with the one end of the terminal.

13. The pressure sensor according to claim 12,

wherein the sensor chip further includes the other surface, which is opposite to the one surface of the sensor chip, and

wherein the one surface and the other surface of the sensor chip are separated apart from the housing.

14. The pressure sensor according to claim 12,

wherein the one surface at the other end of the sensor chip is electrically connected to the one end of the terminal.

15. The pressure sensor according to claim 12,

wherein the sensor chip further includes a bottom surface, which faces a bottom of the groove, and

wherein the bottom surface of the sensor chip is electrically coupled with the one end of the terminal.

16. The pressure sensor according to claim 15,

wherein the one end of the terminal exposed in the groove is bent along with a direction perpendicular to the introduction direction, and

wherein the bottom surface of the sensor chip is electrically coupled with the bent one end of the terminal.

17. The pressure sensor according to claim 12,

wherein the groove has a depth along with the introduction direction, and

wherein the depth of the groove is equal to or larger than a length of the sensor chip so that the sensor chip is accommodated in the groove.

18. The pressure sensor according to claim 12,

wherein the groove has a depth along with the introduction direction, and

wherein the depth of the groove is smaller than a length of the sensor chip so that the one end of the sensor chip protrudes from the groove.

19. The pressure sensor according to claim 12,

wherein the one end of the terminal exposed in the groove has a one-turn bent portion, and

wherein the sensor chip is electrically coupled with a part of the one end of the terminal, the part being disposed on the opening side of the terminal from the one-turn bent portion.

20. The pressure sensor according to claim 12,

wherein the one end of the terminal exposed in the groove has a notch, and

wherein the sensor chip is electrically coupled with a part of the one end of the terminal, the part being disposed on the opening side of the terminal from the notch.

21. The pressure sensor according to claim 12,

wherein the one end of the terminal exposed in the groove has a through hole, and

wherein the sensor chip is electrically coupled with a part of the one end of the terminal, the part being disposed on the opening side of the terminal from the through hole.

22. The pressure sensor according to claim 12,

wherein the one end of the terminal exposed in the groove is bent at a bent portion toward a direction opposite to the sensor chip, and

wherein the sensor chip is electrically coupled with a part of the one end of the terminal, the part being disposed on the opening side of the terminal from the bent portion.

23. The pressure sensor according to claim 12,

wherein the one end of the terminal exposed in the groove contacts a sidewall of the groove, and

wherein the sidewall is parallel to the introduction direction.

24. The pressure sensor according to claim 12, further comprising:

a sealing member disposed in the groove,

wherein the sealing member covers a bonding portion between the sensor chip and the terminal.

25. The pressure sensor according to claim 12, further comprising:

a fixing member disposed in the groove; and

a sealing member disposed on the fixing member in the groove,

wherein the fixing member covers a bonding portion between the sensor chip and the terminal, and

wherein the sealing member has a modulus of elasticity lower than the fixing member.

26. The pressure sensor according to claim 12,

wherein the sensor chip has a rectangular shape with a pair of long sides and a pair of short sides,

wherein each long side is parallel to the introduction direction, and

wherein each short side is perpendicular to the introduction direction.

27. The pressure sensor according to claim 12,

wherein the sensor chip has a plurality of pads disposed on the one surface of the sensor chip on the groove side,

wherein the sensor chip is electrically coupled with the terminal via the plurality of pads, and

wherein the plurality of pads is alternately arranged along with a direction perpendicular to the introduction direction.

28. The pressure sensor according to claim 12,

wherein the one end of the terminal is electrically coupled with the sensor chip via a bump.

29. A method for manufacturing a pressure sensor, wherein the pressure sensor includes:

a housing having a pressure introduction port; and

a case having one end integrated in the housing, wherein the pressure introduction port has an opening for introducing a pressure medium into the pressure introducing port along with an introduction direction so that the pressure medium reaches the one end of the case, wherein the case includes;

a groove disposed on the one end of the case, and hollowed in the introduction direction;

a terminal inserted and molded in the case, and has one end exposed in the groove; and

a sensor chip having one surface parallel to the introduction direction, and including a gage for detecting pressure, wherein the gauge is disposed on the one surface of the sensor chip around one end of the sensor chip, wherein the one end of the sensor chip is disposed on an opening side, wherein the sensor chip further includes the other end, which is opposite to the one end, and disposed on a groove side, and wherein the other end of the sensor chip is electrically coupled with the one end of the terminal, the method comprising;

preparing the case in which the terminal is inserted and molded;

inserting the sensor chip into the groove by holding the other surface of the sensor chip opposite to the one surface of the sensor chip with a jig and by displacing the sensor chip relatively to the case; and

electrically coupling the sensor chip to the terminal after inserting the sensor chip into the groove.

30. The method according to claim 29,

wherein, in the inserting the sensor chip into the groove, the one surface of the sensor chip and the other surface of the sensor chip are separated apart from the housing.

31. The method according to claim 29,

wherein, in the coupling the sensor chip to the terminal, the one surface of the sensor chip is electrically coupled with the one end of the terminal.

32. The method according to claim 29,

wherein, in the coupling the sensor chip to the terminal, a bottom surface of the sensor chip is electrically coupled with the one end of the terminal, and

wherein the bottom surface of the sensor chip faces a bottom of the groove.

33. The method sensor according to claim 32,

wherein the one end of the terminal exposed in the groove is bent along with a direction perpendicular to the introduction direction, and

wherein, in the coupling the sensor chip to the terminal, the bottom surface of the sensor chip is electrically coupled with the bent one end of the terminal.

34. The method according to claim 29,

wherein, in the preparing the case, the one end of the terminal exposed in the groove has a one-turn bent portion, and

wherein, in the coupling the sensor chip to the terminal, the sensor chip is electrically coupled with a part of the one end of the terminal, the part being disposed on the opening side of the terminal from the one-turn bent portion.

35. The method according to claim 29,

wherein, in the preparing the case, the one end of the terminal exposed in the groove has a notch, and

wherein, in the coupling the sensor chip to the terminal, the sensor chip is electrically coupled with a part of the one end of the terminal, the part being disposed on the opening side of the terminal from the notch.

36. The method according to claim 29,

wherein, in the preparing the case, the one end of the terminal exposed in the groove has a through hole, and

wherein, in the coupling the sensor chip to the terminal, the sensor chip is electrically coupled with a part of the one end of the terminal, the part being disposed on the opening side of the terminal from the through hole.

37. The method according to claim 29,

wherein, in the preparing the case, the one end of the terminal exposed in the groove is bent at a bent portion toward a direction opposite to the sensor chip, and

wherein, in the coupling the sensor chip to the terminal, the sensor chip is electrically coupled with a part of the one end of the terminal, the part being disposed on the opening side of the terminal from the bent portion.

38. The method according to claim 29,

wherein, in the preparing the case, the one end of the terminal exposed in the groove contacts a sidewall of the groove, and

wherein the sidewall is parallel to the introduction direction.

39. The method according to claim 29,

wherein, in the coupling the sensor chip to the terminal, the one end of the terminal is electrically coupled with the sensor chip via a bump.

40. The method according to claim 29,

wherein, in the preparing the case, the groove has a depth along with the introduction direction, and

wherein the depth of the groove is equal to or larger than a length of the sensor chip so that the sensor chip is accommodated in the groove.

41. The method according to claim 29,

wherein, in the preparing the case, the groove has a depth along with the introduction direction, and

wherein the depth of the groove is smaller than a length of the sensor chip so that the one end of the sensor chip protrudes from the groove.

42. The method according to claim 29,

wherein, in the preparing the case, the sensor chip has a rectangular shape with a pair of long sides and a pair of short sides,

wherein, in the coupling the sensor chip to the terminal, each long side is parallel to the introduction direction, and

wherein, in the coupling the sensor chip to the terminal, each short side is perpendicular to the introduction direction.