Methods for forming bit line contacts and bit lines during the formation of a semiconductor device

• US 8,030,211 B2
• Filed: 12/02/2009
• Issued: 10/04/2011
• Est. Priority Date: 04/13/2006
• Status: Active Grant

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Aritome, Seiichi
• Primary Examiner(s): Weiss; Howard
• Application Number:
  US12/629,153
• Publication Number:
  US 20100136787A1
• Time in Patent Office: 671 Days
• Field of Search: 257/E21.585, 257/E21.59, 438/672
• US Class Current: 438/672
• CPC Class Codes: H01L 27/0207 Geometrical layout of the components, e.g. computer aided design; custom LSI, semi-custom LSI, standard cell technique
• CPC Class Codes: H10B 41/10 characterised by the top-view layout
• CPC Class Codes: H10B 41/30 characterised by the memory core region
• CPC Class Codes: H10B 41/35 with a cell select transistor, e.g. NAND
• CPC Class Codes: H10B 69/00 Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices

Abstract

A method for forming a semiconductor device comprises forming first and second bit lines at different levels. Forming the bit lines at different levels increases processing latitude, particularly the spacing between the bit lines which, with conventional processes, may strain photolithographic limits. A semiconductor device formed using the method, and an electronic system comprising the semiconductor device, are also described.

Claims

1. A method comprising:

forming a plurality of conductive bit line plugs at a first cross-sectional location and at a second cross-sectional location;

forming a first blanket conductive bit line layer which contacts the plurality of conductive bit line plugs at the first and second cross-sectional locations; and

removing a portion of the first blanket conductive bit line layer to form a plurality of first bit lines which contact the bit line plugs at the first location, but which is removed from contact with the bit line plugs at the second location.

2. The method of claim 1 further comprising:

forming a second blanket conductive bit line layer over the first bit lines and which contacts the bit line plugs at the second location; and

removing a portion of the second blanket conductive bit line layer to form a plurality of second bit line portions which contact the bit line plugs at the second location, but which do not contact the bit line plugs at the first location.

3. The method of claim 2 further comprising planarizing the second blanket conductive bit line layer to remove the second blanket conductive bit line layer from over the plurality of first bit lines to form the second bit line portions.

4. The method of claim 2 further comprising:

forming a third blanket conductive bit line layer over the first bit lines which are electrically coupled to the bit line plugs at the second location through electrical contact with the second bit line portions; and

removing the third blanket conductive bit line layer from over the first bit lines.

5. The method of claim 4 wherein a bottom surface of the third blanket conductive layer at the first cross-sectional location is above a top surface of the first bit lines.

6. The method of claim 2 further comprising:

forming a third blanket conductive bit line layer over the first bit lines which is electrically coupled to the bit line plugs at the second location through electrical contact with the second bit line portions; and

removing a first portion of the third blanket conductive layer from over the first bit lines and leaving a second portion of the third blanket conductive layer over the first bit lines.

7. A method comprising:

forming a plurality of conductive bit line plugs at a first cross-sectional location and at a second cross-sectional location;

forming a first blanket conductive bit line layer which contacts the plurality of conductive bit line plugs at the first and second cross-sectional locations; and

removing a portion of the first blanket conductive bit line layer to form a plurality of first bit lines which contact the bit line plugs at the first location, but which is removed from contact with the bit line plugs at the second location;

forming a dielectric layer over the plurality of first bit lines and bit line plugs at the first cross-sectional location, and over the first bit lines and bit line plugs at the second cross-sectional location;

forming a patterned mask over the bit line plugs at the first cross-sectional location and over the first bit lines at both the first and second cross-sectional locations, wherein the bit line plugs at the second location are uncovered by the patterned mask;

etching the dielectric layer using the patterned mask as a pattern to form a plurality of openings in the dielectric layer which expose the bit line plugs at the second location;

forming a second conductive bit line layer over both the dielectric layer and over the first bit line layer at the first and second cross-sectional locations, and within the plurality of openings in the dielectric layer to contact the bit line plugs at the second cross-sectional location, wherein the second conductive bit line layer does not contact the bit line plugs at the first cross-sectional location; and

etching the second conductive hit line layer at the first and second cross-sectional locations to form a plurality of second bit lines, wherein at least a portion of the second conductive bit line layer remains within the plurality of openings at the second cross-sectional location and over the dielectric layer at the first cross-sectional location subsequent to the etching of the second conductive bit line layer.

8. The method of claim 7 further comprising:

forming the second conductive bit line layer on the dielectric layer at both the first and second cross-sectional locations;

planarizing the second conductive bit line layer; and

subsequent to planarizing the second conductive bit line layer, performing the etch of the second conductive bit line layer, wherein subsequent to the etch an upper surface of the second conductive bit line layer at both the first and second cross-sectional locations is above an upper surface of the dielectric layer at the first and second cross-sectional locations.

9. The method of claim 7 further comprising performing the etch of the second conductive bit line layer such that subsequent to the etch a lower surface of the second bit lines at the first cross-sectional location is above an upper surface of the first bit lines at the first cross-sectional location.

10. A method comprising:

providing a plurality of conductive plugs within a first dielectric layer at a first cross-sectional location and at a second cross-sectional location, wherein each conductive plug electrically contacts one of a plurality of conductive regions of a semiconductor structure;

forming a first blanket conductive layer to electrically contact the conductive plugs at the first cross-sectional location;

forming a blanket second dielectric layer over the blanket conductive layer;

etching the blanket second dielectric layer and the blanket conductive layer to form a plurality of first conductive lines from the first blanket conductive layer, wherein a conductive line contacts each of the conductive plugs at the first cross-sectional location;

forming a second blanket conductive layer which contacts the conductive plugs at the second cross-sectional location; and

removing the second blanket conductive layer from over at least a portion of at least one of the first conductive lines at the first cross-sectional location and to leave the second conductive layer contacting the conductive plugs at the second cross-sectional location.

11. The method of claim 10 wherein subsequent to removing the blanket second dielectric layer, both the first cross-sectional location and the second cross-sectional location comprise at least one first conductive line.

12. The method of claim 10, further comprising:

forming a blanket third dielectric layer over the plurality of first conductive lines, over the conductive plugs at the first cross-sectional location, and over the conductive plugs at the second cross-sectional location;

planarizing the blanket third dielectric layer such that a portion of the third dielectric layer remains between the adjacent first conductive lines at both the first cross-sectional location and at the second cross-sectional location;

forming a patterned photoresist layer over the first conductive lines and over the conductive plugs at the first cross-sectional location, but which leaves the third dielectric layer, the conductive plugs, and at least one first conductive line at the second cross-sectional location uncovered by the patterned photoresist layer; and

etching the third dielectric layer at the second cross-sectional location to expose the conductive plugs at the second cross-sectional location, while the third dielectric layer at the first cross-sectional location remains over the first conductive lines and over the conductive plugs at the first cross-sectional location.

13. The method of claim 12 further comprising forming a plurality of spacers along first and second sidewalls of the first conductive lines such that an edge of each spacer is substantially aligned with an edge of one of the conductive plugs at the second cross-sectional location.

14. The method of claim 10 further comprising forming a portion of a second conductive line over a portion of at least one of the first conductive lines.

15. The method of claim 10, further comprising, prior to forming the first blanket conductive layer:

forming a third dielectric layer over the conductive plugs at both the first cross-sectional location and the second cross-section location;

etching the third dielectric layer to provide openings in the third dielectric layer that expose the conductive plugs at the first cross-sectional location; and

forming supplemental plugs within the openings that contact the conductive plugs at the first cross-sectional location,

wherein forming a first blanket conductive layer to electrically contact the conductive plugs at the first cross-sectional location comprises forming the first blanket conductive layer to physically contact the supplemental plugs at the first cross-sectional location.

16. The method of claim 10, wherein forming a first blanket conductive layer to electrically contact the conductive plugs at the first cross sectional location comprises forming a first blanket conductive layer to electrically contact each of the conductive plugs at both the first cross sectional location and the second cross sectional location.

17. The method of claim 10, wherein subsequent to etching the blanket second dielectric layer and the blanket conductive layer to form a plurality of first conductive lines, no portion of the first blanket conductive layer contacts any of the conductive plugs at the second cross-sectional location.

18. The method of claim 10, further comprising providing a dielectric interposed between adjacent first conductive lines at the first cross sectional location, wherein the conductive plugs at the second cross sectional location are exposed, and wherein forming a second blanket conductive layer comprises forming the second blanket conductive layer over the dielectric.

19. The method of claim 10, wherein removing the second blanket conductive layer from over at least a portion of at least one of the first conductive lines at the first cross-sectional location comprises planarizing the second blanket conductive layer.

20. The method of claim 10, wherein removing the second blanket conductive layer to leave the second conductive layer contacting the conductive plugs at the second cross-sectional location comprises forming second bit line portions at the second cross-sectional location that contact the conductive plugs at the second cross-sectional location, and further comprising:

forming a third conductive layer to contact the second bit line portions at the second cross-sectional location; and

etching the third conductive layer to form second conductive lines.

21. The method of claim 10, wherein removing the second blanket conductive layer to leave the second conductive layer contacting the conductive plugs at the second cross-sectional location comprises forming second conductive lines that contact the conductive plugs at the second cross-sectional location.