Microarray with actuators inside and outside of light-irradiated region, and optical head device and optical information device incorporating the same
First Claim
Patent Images
1. A microarray comprising a two-dimensional array of actuators, each actuator having:
- a base;
a movable section capable of displacement relative to the base;
an elastic supporting member for supporting the movable section; and
a stationary electrode portion formed on the base so as to oppose the movable section, wherein,at least one of the actuators in the microarray disposed in a light-irradiated region includes an optical modulation section having a light reflecting surface for reflecting light on the movable section; and
at least one of the actuators on the surface of the microarray disposed outside the light-irradiated region includes a detection section for detecting a physical condition from an amount of displacement between the movable section and the stationary electrode portion.
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Abstract
An optical head device according to the present invention includes: a light source for outputting laser light; an optical system for allowing the laser light to be radiated onto an optical disk medium; and an aberration correction section for correcting an aberration of the laser light. The aberration correction section includes: a plurality of mirror sections for reflecting the laser light; a plurality of mirror driving sections for displacing the plurality of mirror sections; and a detection section for detecting a physical condition within the optical head device.
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Citations
26 Claims
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1. A microarray comprising a two-dimensional array of actuators, each actuator having:
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a base; a movable section capable of displacement relative to the base; an elastic supporting member for supporting the movable section; and a stationary electrode portion formed on the base so as to oppose the movable section, wherein, at least one of the actuators in the microarray disposed in a light-irradiated region includes an optical modulation section having a light reflecting surface for reflecting light on the movable section; and at least one of the actuators on the surface of the microarray disposed outside the light-irradiated region includes a detection section for detecting a physical condition from an amount of displacement between the movable section and the stationary electrode portion. - View Dependent Claims (2, 3, 4, 5)
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6. An optical head device comprising:
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a light source for outputting laser light; an optical system for allowing the laser light to be radiated onto an optical disk medium; and an aberration correction section for correcting an aberration of the laser light, wherein, the aberration correction section includes a microarray comprising a two-dimensional array of a plurality of actuators; at least one of the plurality of actuators reflects the laser light; and the aberration correction section further includes a detection section for detecting a physical condition within the optical head device, wherein at least one of the actuators in the microarray disposed in a light-irradiated region includes an optical modulation section having a light reflecting surface for reflecting light; and the detection section is at least one of the actuators on the surface of the microarray disposed outside the light-irradiated region. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A microarray comprising a two-dimensional array of actuators, each actuator having:
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a base; a movable section capable of displacement relative to the base; an elastic supporting member for supporting the movable section; and a piezoelectric member for displacing the movable section, wherein, at least one of the actuators in the microarray disposed in a light-irradiated region includes an optical modulation section having a light reflecting surface for reflecting light on the movable section; and at least one of the actuators on the surface of the microarray disposed outside the light-irradiated region includes a detection section for detecting a physical condition from a strain of the piezoelectric member. - View Dependent Claims (22, 23, 24, 25, 26)
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Specification