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Microarray with actuators inside and outside of light-irradiated region, and optical head device and optical information device incorporating the same

  • US 8,031,578 B2
  • Filed: 08/25/2006
  • Issued: 10/04/2011
  • Est. Priority Date: 08/26/2005
  • Status: Expired due to Fees
First Claim
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1. A microarray comprising a two-dimensional array of actuators, each actuator having:

  • a base;

    a movable section capable of displacement relative to the base;

    an elastic supporting member for supporting the movable section; and

    a stationary electrode portion formed on the base so as to oppose the movable section, wherein,at least one of the actuators in the microarray disposed in a light-irradiated region includes an optical modulation section having a light reflecting surface for reflecting light on the movable section; and

    at least one of the actuators on the surface of the microarray disposed outside the light-irradiated region includes a detection section for detecting a physical condition from an amount of displacement between the movable section and the stationary electrode portion.

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