LED with substrate modifications for enhanced light extraction and method of making same
First Claim
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1. A method of fabricating a light emitting diode (LED) comprising:
- growing a light emission region on a first surface of a substrate, the light emission region including an active layer between first and second oppositely doped layers;
creating a moth-eye morphology in at least a portion of a second surface of the substrate;
forming a first contact on the second surface of the substrate and in electrical contact with one of the first or second doped layers; and
forming a second contact in electrical contact with the other of the first or second doped layers.
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Abstract
The surface morphology of an LED light emitting surface is changed by applying processes, such as a reactive ion etch (RIE) process to the light emitting surface. In one embodiment, the changed surface morphology takes the form of a moth-eye surface. The surface morphology created by the RIE process may be emulated using different combinations of non-RIE processes such as grit sanding and deposition of a roughened layer of material or particles followed by dry etching.
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Citations
15 Claims
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1. A method of fabricating a light emitting diode (LED) comprising:
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growing a light emission region on a first surface of a substrate, the light emission region including an active layer between first and second oppositely doped layers; creating a moth-eye morphology in at least a portion of a second surface of the substrate; forming a first contact on the second surface of the substrate and in electrical contact with one of the first or second doped layers; and forming a second contact in electrical contact with the other of the first or second doped layers. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method of fabricating a light emitting diode (LED) comprising:
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growing a light emission region on a first surface of a substrate, the light emission region including an active layer between first and second oppositely doped layers; forming a layer on a second surface of the substrate, the layer having a refractive index substantially the same as the substrate and a moth-eye surface morphology; forming a first contact on the layer and in electrical contact with one of the first or second doped layers; and forming a second contact in electrical contact with the other of the first or second doped layers. - View Dependent Claims (14, 15)
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Specification