Method and apparatus for resonant frequency identification through out-of-plane displacement detection

• US 8,035,820 B2
• Filed: 07/15/2010
• Issued: 10/11/2011
• Est. Priority Date: 12/12/2006
• Status: Active Grant

• Current Assignee: Industrial Technology Research Institute
• Original Assignee: Industrial Technology Research Institute
• Inventors: Chang, Chung-Chu, Chen, Jin-Liang, Chen, Liang-Chia, Huang, Yao-Ting
• Primary Examiner(s): Connolly; Patrick J
• Application Number:
  US12/837,419
• Publication Number:
  US 20100277744A1
• Time in Patent Office: 453 Days
• Field of Search: 356/502, 736/55, 736/57
• US Class Current: 356/498
• CPC Class Codes: G01B 11/161 by interferometric means

Abstract

A method for out-of-plane displacement detection is disclosed. The out-of-plane displacement is detected by analyzing all the fringe density indexes calculated using the frequency-domain information extracted from a series of interference images of the sample vibrating at different frequencies. The present invention further discloses a method and an apparatus for resonant frequency identification by detecting the peak value of all the fringe indexes calculated at different scanning frequencies. With the identified resonant frequency, the full-field vibratory surface profile of the sample in various resonance modes can be reconstructed.

Claims

1. An apparatus for out-of-plane displacement detection and resonant frequency identification, comprising:

a central control unit;

a synchronous control unit, coupled to the central control unit for generating the first, second and third control signals synchronously with the control signal of the central control unit;

a vibration-driving unit for carrying and vibrating the sample upon receiving the first control signal;

a light-emitting unit for generating a stroboscopic flash upon receiving the second control signal; and

an image acquisition unit for acquiring a series of interference images from the sample upon receiving the third control signal, and transmitting the interference image acquired to the central control unit,

wherein the central control unit receives and processes the series of interference images by using image-filtering, extracts frequency-domain information from the series of processed interference images to calculate a fringe density index of each processed interference image, and detects the out-of-plane displacement of the vibrating sample from the fringe density indexes calculated.

2. The apparatus for out-of-plane displacement detection and resonant frequency identification as recited in claim 1, wherein the synchronous control unit further comprises:

a frequency divider for generating a frequency dividing signal upon receiving the control signal 90 from the wave-form generator;

a delay circuit for generating a delay signal upon receiving the frequency dividing signal from the frequency divider; and

a square-wave generator for receiving and converting the frequency dividing signal and the delay signal into square-wave signals to generate the second control signal.

3. The apparatus for out-of-plane displacement detection and resonant frequency identification as recited in claim 2, wherein the third control signal is generated either by the delay circuit or the square-wave generator.

4. The apparatus for out-of-plane displacement detection and resonant frequency identification as recited in claim 1, wherein the synchronous control unit further comprises:

a frequency divider for generating a frequency dividing signal upon receiving the control signal 90 from the wave-form generator;

a square-wave generator for generating a square-wave signal upon receiving the frequency dividing signal; and

a delay circuit for delaying the square-wave signal and generating the second control signal from the delayed square-wave signal.

5. The apparatus for out-of-plane displacement detection and resonant frequency identification as recited in claim 4, wherein the third control signal is generated either by the delay circuit or the square-wave generator.

6. The apparatus for out-of-plane displacement detection and resonant frequency identification as recited in claim 1, wherein the vibration-driving unit is a piezoelectric element (PZT) vibration-driving unit.

7. The apparatus for out-of-plane displacement detection and resonant frequency identification as recited in claim 1, wherein the control signal is a pulse, a sine-wave or a square-wave.

8. The apparatus for out-of-plane displacement detection and resonant frequency identification as recited in claim 1, wherein the light-emitting unit is a light-emitting diode.

9. An apparatus for out-of-plane displacement detection and resonant frequency identification, comprising:

a central control unit;

a synchronous control unit, coupled to the central control unit for generating the first, second and third control signals synchronously with the control signal of the central control unit;

a vibration-driving unit for carrying and vibrating the sample upon receiving the first control signal;

a light-emitting unit for generating a stroboscopic flash upon receiving the second control signal; and

an image acquisition unit for acquiring a series of interference images from the sample upon receiving the third control signal, and transmitting the interference image acquired to the central control unit;

wherein the central control unit receives and processes the series of interference images by using image-filtering, extracts frequency-domain information from the series of processed interference images to calculate a fringe density index of each processed interference image, and detects a peak value by analyzing all the fringe density indexes calculated to identify a resonant frequency of the vibrating sample.

10. The apparatus for out-of-plane displacement detection and resonant frequency identification as recited in claim 9, wherein the synchronous control unit further comprises:

a frequency divider for generating a frequency dividing signal upon receiving the control signal 90 from the wave-form generator;

a delay circuit for generating a delay signal upon receiving the frequency dividing signal from the frequency divider; and

a square-wave generator for receiving and converting the frequency dividing signal and the delay signal into square-wave signals to generate the second control signal.

11. The apparatus for out-of-plane displacement detection and resonant frequency identification as recited in claim 10, wherein the third control signal is generated either by the delay circuit or the square-wave generator.

12. The apparatus for out-of-plane displacement detection and resonant frequency identification as recited in claim 9, wherein the synchronous control unit further comprises:

a frequency divider for generating a frequency dividing signal upon receiving the control signal 90 from the wave-form generator;

a square-wave generator for generating a square-wave signal upon receiving the frequency dividing signal; and

a delay circuit for delaying the square-wave signal and generating the second control signal from the delayed square-wave signal.

13. The apparatus for out-of-plane displacement detection and resonant frequency identification as recited in claim 12, wherein the third control signal is generated either by the delay circuit or the square-wave generator.

14. The apparatus for out-of-plane displacement detection and resonant frequency identification as recited in claim 9, wherein the vibration-driving unit is a piezoelectric element (PZT) vibration-driving unit.

15. The apparatus for out-of-plane displacement detection and resonant frequency identification as recited in claim 9, wherein the control signal is a pulse, a sine-wave or a square-wave.

16. The apparatus for out-of-plane displacement detection and resonant frequency identification as recited in claim 9, wherein the light-emitting unit is a light-emitting diode.